1998
DOI: 10.1016/s0022-2313(98)00093-3
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Ellipsometric study of refractive index anisotropy in porous silicon

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Cited by 23 publications
(13 citation statements)
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“…The preferred direction of porous silicon structures is perpendicular to the substrate-porous interface. All the studied samples exhibit optical anisotropy as observed in our ellipsometric measurements [21].…”
Section: Methodssupporting
confidence: 73%
“…The preferred direction of porous silicon structures is perpendicular to the substrate-porous interface. All the studied samples exhibit optical anisotropy as observed in our ellipsometric measurements [21].…”
Section: Methodssupporting
confidence: 73%
“…The quantum confinement effects must be taken into account when the pore walls thickness is approximately or less than 3 nm 14 . Finally, the microscopic column-like structure, which under certain circumstances can lead to anisotropic behavior of the optical response, must be considered too 9 15 .…”
Section: Methodsmentioning
confidence: 99%
“…Several ellipsometric optical models have been applied to a great variety of pSi structures and after a considerable amount of debate about the reliability and validity of those models, some commonly accepted results give the guidelines that set a point of departure in the analysis of specific samples. These results were obtained mainly from two approaches that have been particularly successful: the gradual porosity 7 and the morphological anisotropy models 9 . Each of them has advantages and disadvantages, however, the boundary of their applicability has not been well defined so far and results from other characterization techniques such as Scanning Electron Microscopy (SEM), could be determinant to complement the optical analysis based on these models.…”
mentioning
confidence: 99%
“…Anisotropy of PS depends on the crystalline orientation of the silicon substrate. Birefringence has been reported in (100), (111) and (110) oriented PS [53,54,55,56,57]. In all these cases, the PS layer can be assumed to be uniaxial, and the direction of the optical axis to be normal to the surface for the (100) and (111) …”
Section: Dielectric Function and Refractive Indexmentioning
confidence: 99%