Ellipsometric parameters and reflectances of thin films with slightly rough boundaries

Optical quantities of rough films calculated by Rayleigh‐Rice theory

“…NOL is represented with the identical rough layer (IRL) for which both the boundaries are identical from the geometrical and statistical points of view [2]. The power spectral density function (PSDF) was given with the Gaussian function containing two parameters, i. e. rms value of the heights σ of roughness and autocorrelation length τ characterizing the lateral dimensions of roughness.…”

“…The Rayleigh-Rice theory (RRT) is the vector perturbation approach to the solution of the Maxwell equations for slightly rough surfaces and thin films [1,2]. Within ellipsometry this theory only has been employed in our earlier papers [3][4][5][6] in contrast to the effective medium approximation (EMA) used in many papers of other researchers.…”

The Small-Slope Approximation Method Applied to a Three-Dimensional Slab With Rough Boundaries

“…(125), (126) the first order terms give for Φ (10) andΦ (01) an expression in terms of the known operators X (1) u , X…”

“…where in the calculations we keep all the terms ofΦ (11) giving a contribution toΦ (10) andΦ (01) . We see that Eqs.…”

“…Theoretical and numerical approaches have received a wide interest, we mention: the small-perturbation method (SPM) [5][6][7][8][9][10], the Kirchhoff (or tangent plane) approximation method [1,11,12]. However, some restrictions limit the domain of their applicability, the perturbation method is only valid for surfaces with small roughness and the Kirchhoff approximation is applicable to surfaces with long correlation length.…”