“…[6][7][8] Among these methods, EWOD has become a popular topic and a useful technology in academic research worldwide relative to other driving forces or control methods due to special advantages, such as straightforward fabrication, low cost, compatibility with conductive or polar fluids, and convenient programmable control. The effect changes the electron distribution in droplets, and the force of static electricity changes the contact angle of droplets, enabling diverse applications, such as micro-valves, 9 focal lenses, [10][11][12][13] fibers, 14,15 screens, 16,17 transport, [18][19][20][21][22][23][24] printing, 25 transistors, 26 electrical switches, 27,28 thermal control 29,30 and thermal management. 31 An increasing number of studies have applied the advantage of EWOD to be amplified in micro-systems, particularly for micro-optical devices, because droplets can adjust the focal length by changing the radius of curvature, using the properties of droplet flexibility with an applied voltage.…”
Section: Introductionmentioning
confidence: 99%
“…[2][3][4][5][6][7][8] Tilting the manipulation stage is one of the most important optical devices because light requires accurate control in direction to achieve specific requirements, such as switching in fibers. 14,15 Some investigations have focused on tilt manipulation. In a previous investigation, Kang H 33 investigated mirror manipulation using EWOD but did not analyze the device limit or tribological issues in the device and the mirror did not fixed by top plate, which may cause droplets slide.…”
This work designed a new tilt manipulation stage based on the electrowetting-on-dielectric (EWOD) principle as the actuating mechanism and investigated the performance of that stage. The stage was fabricated using a universal MEMS (Micro-Electro-Mechanical System) fabrication method. In the previously demonstrated form of this device, the tilt stage consisted of a top plate that functions as a mirror, a bottom plate that was designed for changing the shape of water droplets, and supporters that were fixed between the top and bottom plate. That device was actuated by a voltage applied to the bottom plate, resulting in a static electric force actuating the shape change in the droplets by moving the top plate in the vertical direction. Previous experimental results indicated that that device can tilt at up to ±1.8°, with a resolution of 7 μm in displacement and 0.05° in angle. By selecting the best combination of the dielectric layer, the tilt angle was maximized. The new device, fabricated using a common and straightforward fabrication method, avoids deflection of the top plate and grounding in the bottom plate. Because of the limit of Teflon and other MEMS materials, this device has a tilt angle in the range of 3.2-3.5° according to the experimental data for friction and the EWOD device limit, which is close to 1.8°. This paper also describe the investigation of the effects of various parameters, e.g., various dielectric materials, thicknesses, and droplet type and volume, on the performance of the stage. The results indicate that the apparent frictions coefficient of the solid-liquid interface may remain constant, i.e., the friction force is proportional to the normal support force and the apparent frictions coefficient.
“…[6][7][8] Among these methods, EWOD has become a popular topic and a useful technology in academic research worldwide relative to other driving forces or control methods due to special advantages, such as straightforward fabrication, low cost, compatibility with conductive or polar fluids, and convenient programmable control. The effect changes the electron distribution in droplets, and the force of static electricity changes the contact angle of droplets, enabling diverse applications, such as micro-valves, 9 focal lenses, [10][11][12][13] fibers, 14,15 screens, 16,17 transport, [18][19][20][21][22][23][24] printing, 25 transistors, 26 electrical switches, 27,28 thermal control 29,30 and thermal management. 31 An increasing number of studies have applied the advantage of EWOD to be amplified in micro-systems, particularly for micro-optical devices, because droplets can adjust the focal length by changing the radius of curvature, using the properties of droplet flexibility with an applied voltage.…”
Section: Introductionmentioning
confidence: 99%
“…[2][3][4][5][6][7][8] Tilting the manipulation stage is one of the most important optical devices because light requires accurate control in direction to achieve specific requirements, such as switching in fibers. 14,15 Some investigations have focused on tilt manipulation. In a previous investigation, Kang H 33 investigated mirror manipulation using EWOD but did not analyze the device limit or tribological issues in the device and the mirror did not fixed by top plate, which may cause droplets slide.…”
This work designed a new tilt manipulation stage based on the electrowetting-on-dielectric (EWOD) principle as the actuating mechanism and investigated the performance of that stage. The stage was fabricated using a universal MEMS (Micro-Electro-Mechanical System) fabrication method. In the previously demonstrated form of this device, the tilt stage consisted of a top plate that functions as a mirror, a bottom plate that was designed for changing the shape of water droplets, and supporters that were fixed between the top and bottom plate. That device was actuated by a voltage applied to the bottom plate, resulting in a static electric force actuating the shape change in the droplets by moving the top plate in the vertical direction. Previous experimental results indicated that that device can tilt at up to ±1.8°, with a resolution of 7 μm in displacement and 0.05° in angle. By selecting the best combination of the dielectric layer, the tilt angle was maximized. The new device, fabricated using a common and straightforward fabrication method, avoids deflection of the top plate and grounding in the bottom plate. Because of the limit of Teflon and other MEMS materials, this device has a tilt angle in the range of 3.2-3.5° according to the experimental data for friction and the EWOD device limit, which is close to 1.8°. This paper also describe the investigation of the effects of various parameters, e.g., various dielectric materials, thicknesses, and droplet type and volume, on the performance of the stage. The results indicate that the apparent frictions coefficient of the solid-liquid interface may remain constant, i.e., the friction force is proportional to the normal support force and the apparent frictions coefficient.
“…Liquid metal has a wide variety of applications, including recon gurable antennas 1,2) and lters 3) , optical switches 4) , and wearable electronics 5) , due to the basic properties of the metal, such as high electrical conductivity, thermal conductivity, and re ectivity, but also the dynamic nature of ow. At present, the study of electrowetting mainly focuses on the aqueous solutions or other organic uids on the surfaces of dielectric materials 6,7) , by the consideration of potential application of varifocal lens and surface tension-driven micro-electromechanical systems (MEMS) devices, but the uids using the liquid metals are rarely concerned.…”
Electrocapillary behaviors for liquid Wood alloy in NaOH aqueous solution by applying external low voltage were investigated. The electrode reaction (redox reaction) induced the formation or removing of oxide lm, and further caused the drop deformation by decreasing or increasing of interfacial tension. The same polar charge in the electric double layer would also decrease the interfacial tension. In order to maintain the stability of the system, the contact area of the interface would be expanded, and induced drop deformation macroscopically. When the liquid metal was charged by the chemical reaction in the solution, the electric eld force is an effective way to drive it.
“…1,2) The change in the wettability of the fluid has been confirmed to be reversible at low voltages, for example, for a droplet of liquid metal (mercury) 2) or a droplet of 10 À2 M KNO 3 electrolyte 3) on various dielectric films. By using this technique, many applications have been recently achieved in micro-actuation, 2,4,5) micro-fluidic transport and mixing, 6,7) switchable devices, 8,9) liquid lens profile control [10][11][12] and self-assembled particle arrays. 13) However, with the exception of dielectric films, the change in the wettability of fluids on conductive surfaces in external electrostatic fields has not been investigated in detail.…”
The wettability of NaCl solutions on SUS304 stainless steel was investigated under cathodic and anodic current. It was found that the contact angle became small when a cathodic current of 1.0 mA was applied, with a tendency of higher wettability for higher concentrations (between 0.01% and 0.1%). However, the decrease in the contact angle is irreversible even if the current is stopped or anodic current is applied. This phenomenon can be attributed to changes in the electric charge and the passive film at the interface.
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