Electrostatic micro actuator fabricated by micro stereo lithography (IH process)

Ikuta, Koji; Hirowatari, K.; Ogata, Toshiyuki

doi:10.1109/ismmhs.1994.512912

Cited by 7 publications

(8 citation statements)

References 1 publication

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“…in their largest dimension. Three-dimensional photolithographystereolithographyis available, but this methodology is more expensive and time-consuming than 2-D photolithography. ,, …”

mentioning

confidence: 99%

Prototyping of Microfluidic Devices in Poly(dimethylsiloxane) Using Solid-Object Printing

et al. 2002

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A solid-object printer was used to produce masters for the fabrication of microfluidic devices in poly(dimethylsiloxane) (PDMS). The printer provides an alternative to photolithography for applications where features of > 250 microm are needed. Solid-object printing is capable of delivering objects that have dimensions as large as 250 x 190 x 200 mm (x, y, z) with feature sizes that can range from 10 cm to 250 microm. The user designs a device in 3-D in a CAD program, and the CAD file is used by the printer to fabricate a master directly without the need for a mask. The printer can produce complex structures, including multilevel features, in one unattended printing. The masters are robust and inexpensive and can be fabricated rapidly. Once a master was obtained, a PDMS replica was fabricated by molding against it and used to fabricate a microfluidic device. The capabilities of this method are demonstrated by fabricating devices that contain multilevel and tall features, devices that cover a large area (approximately 150 cm2), and devices that contain nonintersecting, crossing channels.

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“…in their largest dimension. Three-dimensional photolithographystereolithographyis available, but this methodology is more expensive and time-consuming than 2-D photolithography. ,, …”

mentioning

confidence: 99%

Prototyping of Microfluidic Devices in Poly(dimethylsiloxane) Using Solid-Object Printing

et al. 2002

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“…This process is repeated until the desired structure is obtained. Other exposure strategies are also possible, such as the 'free surface' approach shown in Microstereolithography offers exceptional 3D capability, and can achieve resolutions down to a few microns, making it particularly relevant to actuators and fluidic devices [34,35]. It can also produce integrated structures with both fixed and freely moving parts [36].…”

Section: Stereolithographymentioning

confidence: 99%

<title>Laser fabrication and assembly processes for MEMS</title>

Holmes

2001

SPIE Proceedings

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This paper discusses the use of high power lasers in the manufacture of microelectromechanical systems (MEMS). The ability to process a wide range of materials, and to produce truly three-dimensional structures with tolerances at the micron or sub-micron level, give laser micromachining some key advantages over other more established micromachining techniques. Previous work in this area is reviewed, covering the following topics: use of ablation in the direct fabrication of MEMS devices and to define polymer masters for subsequent replication by electroforming and moulding (the so-called Laser-LIGA process); laser-assisted deposition and etching on planar and non-planar surfaces; laser-assisted manipulation of microparts and laser-assisted assembly.

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“…Researchers are developing multi-functional photocurable polymer including functional particles: ceramics, metal characteristics, and conductivity [1,2,3]. These functional polymers are applied in many fields.…”

Section: Introductionmentioning

confidence: 99%

3D general photocurabel model of resin with various kinds of microparticles

Yasui

Ikuta

2013

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

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We have constructed world-first generalized model for expecting 3D curing characteristics of photocurable polymer including micro particles. First, our theory is applicable for all polymers that respond to light. Second, we can adapt all kinds of particles to our theory. Moreover, the complicated calculation is not necessary. We can expect 3D curing properties through characteristics of resin and microparticles. Therefore, our theory is useful for developing newly photocurable polymer not only with microparticles, but also without microparticles. We believe that our model becomes fundamental theory for the 2D and 3D microfabrication in the photolithography and microstereolithography.

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Electrostatic micro actuator fabricated by micro stereo lithography (IH process)

Cited by 7 publications

References 1 publication

Prototyping of Microfluidic Devices in Poly(dimethylsiloxane) Using Solid-Object Printing

Prototyping of Microfluidic Devices in Poly(dimethylsiloxane) Using Solid-Object Printing

<title>Laser fabrication and assembly processes for MEMS</title>

3D general photocurabel model of resin with various kinds of microparticles

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