Electrostatic actuation of microscale liquid-metal droplets

Latorre, Laurent; Kim, Joonwon; Lee, Junghoon; Guzmán, Pablo; Lee, H.J.; Nouet, Pascal; Kim, Chang‐Jin

doi:10.1109/jmems.2002.800934

Cited by 47 publications

(30 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…After resolving all variables in terms of and and simplifying, we arrive at (2) Now, for any given buckled configuration, is fixed. So, if we define , our dynamic equation simplifies to (3) To get a better feel for this equation, it is helpful to nondimensionalize it. We define , where is a yet to be determined constant, and where is the first critical buckling load of the beam.…”

Section: Dynamical Modelmentioning

confidence: 99%

“…Fig. 3 shows typical simulated results for the full dynamic model given in (3). Here, the beam is initially buckled to a displacement of 2.25 .…”

Section: Dynamical Modelmentioning

confidence: 99%

“…At , it directs light to shine a pixel, at , it deflects the light away leaving the pixel dark. Bistable systems have been used as micropumps [2], switches [3], and relays [4]. Bistability in MEMS is generally achieved by actuation, such as thermal [5], electrostatic [1], or residual stresses [6].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Nonlinear Dynamic Study of a Bistable MEMS: Model and Experiment

Sulfridge

Saif

Miller

et al. 2004

J. Microelectromech. Syst.

View full text Add to dashboard Cite

In the Journal of Microelectromechanical Systems, vol. 11, pp. 574-583, Oct. 2002, we presented an actuation scheme for toggling a bistable MEMS, a buckled beam, from one stable state to the other using radiation pressure of light. The experiments revealed some anomalous behavior of the beam. While long duration laser pulses at a power level slightly above the toggle threshold reliably toggled the beam every time, short duration pulses of the same power toggled the beam only about two-thirds of the time. In addition, when excessively high power levels (far above the toggle threshold) were used, the beam would not reliably toggle regardless of the pulse duration. This paper resolves the anomaly. It presents a nonlinear dynamical analysis of the bistable beam device which explains the anomaly as follows: a slightly higher than threshold force, applied for sufficient time, toggles the beam. If the force duration is longer than the time of decay of the oscillation of the beam about the toggled state, then the beam remains in that state after the force is removed. Otherwise, the beam may return to the original state. On the other hand, if the beam is toggled by a force far above the threshold, then after removal of the force, the beam may oscillate spanning both the states until the motion decays and the beam settles down to one of the states, not necessarily the toggled state, which may appear to be an anomalous behavior. The theoretical model is validated by a series of toggling experiments. [1035]

show abstract

Section: Dynamical Modelmentioning

confidence: 99%

“…Fig. 3 shows typical simulated results for the full dynamic model given in (3). Here, the beam is initially buckled to a displacement of 2.25 .…”

Section: Dynamical Modelmentioning

confidence: 99%

See 1 more Smart Citation

Nonlinear Dynamic Study of a Bistable MEMS: Model and Experiment

Sulfridge

Saif

Miller

et al. 2004

J. Microelectromech. Syst.

View full text Add to dashboard Cite

show abstract

“…A common example of such a switch is found in the protraction/ retraction mechanism of most mechanical pens. There are two general types of bistable mechanisms being reported in MEMS literature: compliant [1][2][3][4][5] and noncompliant [6][7][8][9] mechanisms. We present a novel design for a noncompliant bistable MEMS mechanism.…”

Section: Introductionmentioning

confidence: 99%

New design for surface micromachined bistable and multistable switches

Foulds

Trinh

et al. 2003

J. Micro/Nanolith. MEMS MOEMS

View full text Add to dashboard Cite

Microsystems often require switches or mechanisms to provide two stable states. In answer to this need, we design a novel micromechanical bistable switch based on the locking mechanism commonly used in extension ladders. This switch was designed and fabricated through the multiuser MEMS processes (MUMPs). Actual performance of the switch was videotaped, analyzed, and compared with theory and simulation. This design was fully functional on the first design iteration, and can easily be extended to provide multiple stable states. We outline the design, simulation, and results from the testing of the microfabricated system.

show abstract

“…Thus a single PWM input bistable mechanism allows a designer to decrease the input count while still maintaining easy controllability. Other bistable mechanisms in the literature have dual inputs[3,[6][7][8][9][10][11], or a single voltage level controlled input[12].…”

mentioning

confidence: 99%

A pulse width modulation controlled bistable microelectromechanical system

Faoulds

Johnstone

Parameswaran

Canadian Conference on Electrical and Computer Engineering, 2005.

View full text Add to dashboard Cite

This paper describes a pulse width modulation controlled bistable microelectromechanical system (MEMS). A bistable mechanism offers two distinct equilibrium states without requiring input power to stay in either of the stable states. The state of the single digital input bistable MEMS device described in this paper is determined by the duration of the input pulse to the actuators. Applications of bistable mechanisms include MEMS relays and optical switches. By using a single digital input and pulse width modulation control, this design allows for easier integration with digital drive circuitry.This mechanism is able to use a single digital input because it utilizes the difference in time constants between two perpendicular actuators. The design consists of two actuators situated perpendicularly to each other, which are both connected to a hook shape. This hook latches with an opposing hook, which anchored to the substrate, when an input pulse of sufficient duration is applied to the actuators. The hooks will disengage when an input pulse of appropriate duration is applied to the actuators. Operating principles and physical theory behind the actuation technique will be discussed in detail. As well, the current state of this research and an analysis of a prototype device fabricated using MUMPs ® will be discussed.

show abstract

Electrostatic actuation of microscale liquid-metal droplets

Cited by 47 publications

References 14 publications

Nonlinear Dynamic Study of a Bistable MEMS: Model and Experiment

Nonlinear Dynamic Study of a Bistable MEMS: Model and Experiment

New design for surface micromachined bistable and multistable switches

A pulse width modulation controlled bistable microelectromechanical system

Contact Info

Product

Resources

About