Nonlinear Dynamic Study of a Bistable MEMS: Model and Experiment

Sulfridge, Marc; Saif, Taher A.; Miller, N.R.; Meinhart, Mark

doi:10.1109/jmems.2004.835766

Cited by 57 publications

(41 citation statements)

References 9 publications

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“…Bistable MEMS devices have also been conceived for a number of applications including micromirrors (157) , micro-pumps (176) , and relays (177) . Interesting observations about jumps from oscillations about one equilibrium position to oscillations about the other equilibrium position have been reported through simulations and experiments (178) . Dynamically bistable MEMS have also been of recent interest, and have provided a nice platform for investigating basins of attraction (179) .…”

Section: Journal Of System Design and Dynamicsmentioning

confidence: 99%

A Review of Nonlinear Dynamics of Mechanical Systems in Year 2008

Shaw

Balachandran

2008

JSDD

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In this article, we provide an overview of a selection of topics of current interest in nonlinear dynamics and vibrations of mechanical systems. Specifically, we cover the traditional topics of structural dynamics, rotating systems, vibration control, vehicle dynamics, and machining, as well as some topics that have emerged more recently, namely micro-and nano-electromechanical systems, piecewise smooth systems, and structural health monitoring and system identification. In the introductory and closing sections, we offer our perspective on the state of affairs in nonlinear dynamics and its utility in the study of mechanical systems.

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Section: Journal Of System Design and Dynamicsmentioning

confidence: 99%

A Review of Nonlinear Dynamics of Mechanical Systems in Year 2008

Shaw

Balachandran

2008

JSDD

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“…It may therefore be worthwhile to consider integrating NEMS components into conventional Si devices in order to add new functionality. 7,8) We have proposed a new fast and nonvolatile memory device 9) based on the bistable operation 10,11) of a sub-mmlong NEMS structure, combined with nanocrystalline (nc-) Si quantum dots. 12) A basic concept of nonvolatile memory based on the mechanical bistability of a micromachined bridge has been reported.…”

Section: Introductionmentioning

confidence: 99%

Electromechanical Simulation of Switching Characteristics for Nanoelectromechanical Memory

Nagami

Tsuchiya

Saito

et al. 2009

Jpn. J. Appl. Phys.

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The static switching properties and readout characteristics of proposed high-speed and nonvolatile nanoelectromechanical (NEM) memory devices are investigated. By conducting a three-dimensional finite element mechanical simulation combined with an electrostatic analysis, we analyze the electromechanical switching operation of a mechanically bistable NEM floating gate by applying gate voltage. We show that switching voltage can be reduced to less than 10 V by reducing the zero-bias displacement of the floating gate and optimizing the cavity structure to improve mechanical symmetry. We also analyze the electrical readout property of the NEM memory devices by combining the electromechanical simulation with a drift-diffusion analysis. We demonstrate that the mechanically bistable states of the floating gate can be detected via the changes in drain current with an ON/OFF current ratio of about 3 Â 10 4 .

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“…Depending on the type of comb-drive actuator, this induced strain can be either tensile or compressive. The former allows the disentanglement of strain and charge carrier density effects in mechanical resonators, whereas the latter is particularly relevant to gain control over buckling modes in mechanical resonators [34,35].Coupled micro-and nanomechanical resonators are known to show sensitive sympathetic oscillation dynamics that show better performance in potential applications than a single resonator [36][37][38][39][40]. One major challenge for this type of resonators is an in-situ control over the coupling [41].…”

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confidence: 99%

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confidence: 99%

Tunable mechanical coupling between driven microelectromechanical resonators

Verbiest

Goldsche

et al. 2016

Applied Physics Letters

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We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive actuator, that is used to tune the tension in the silicon beam, and thus its resonance frequency. By measuring the resonance frequencies of the system, we show that the comb-drive actuator and the silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate (∼ 1.5 MHz) is tunable with the comb-drive actuator (+10%) as well as with a side-gate (−10%) placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive to either of them and changes only by ±0.5%. Finally, we show that the comb-drive actuator can be used to switch between different coupling rates with a frequency of at least 10 kHz.Micro-and nanoelectromechanical resonators have attracted much attention thanks to their potential application as sensors [1][2][3][4][5][6][7][8], filters [9][10][11], amplifiers [12,13], and logic gates [14], with frequencies varying from the kHz to the GHz range [15][16][17]. By applying tension, the resonance frequencies can be tuned in-situ [18][19][20]. This is usually done by applying a DC voltage to a nearby gate to induce a deformation of the resonator via the electrostatic potential [21][22][23]. However, one does not only induce tension by applying an electrostatic potential, but one also changes the number of charge carriers [24][25][26], which both affect the properties of the resonator [27,28]. An ideal candidate to circumvent this problem is the comb-drive actuator, which is nowadays widely used to detect accelerations and rotations as well as to manipulate, stretch, or move objects [29][30][31][32][33]. By mechanically fixing a resonator to a comb-drive, one can purely mechanically induce strain in the resonator. Depending on the type of comb-drive actuator, this induced strain can be either tensile or compressive. The former allows the disentanglement of strain and charge carrier density effects in mechanical resonators, whereas the latter is particularly relevant to gain control over buckling modes in mechanical resonators [34,35].Coupled micro-and nanomechanical resonators are known to show sensitive sympathetic oscillation dynamics that show better performance in potential applications than a single resonator [36][37][38][39][40]. One major challenge for this type of resonators is an in-situ control over the coupling [41]. From a fundamental point of view, a tunable mechanical coupling is interesting because of the feasibility to coherently manipulate phonon populations in coupled resonators [42,43] and to create intrinsically localized modes [44]. From an applied point of view, researchers are able to build novel mass sensors, bandpass filters, and single-electron detectors [45][46][47]. Fast in-situ control over the coupling between mechanical resonators is an important step towards mechanical logic gates [48]. Comb drives are suspended microelectromechanical sys- The scale bars indicate 20 µm, 2 µm and 10 µm, from left to right. T...

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Nonlinear Dynamic Study of a Bistable MEMS: Model and Experiment

Cited by 57 publications

References 9 publications

A Review of Nonlinear Dynamics of Mechanical Systems in Year 2008

A Review of Nonlinear Dynamics of Mechanical Systems in Year 2008

Electromechanical Simulation of Switching Characteristics for Nanoelectromechanical Memory

Tunable mechanical coupling between driven microelectromechanical resonators

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