2009
DOI: 10.1088/0022-3727/42/8/085110
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Electronic transport properties of Ti-impurity band in Si

Abstract: In this paper we show that pulsed laser melted high dose implantation of Ti in Si, above the Mott transition, produces an impurity band (IB) in this semiconductor. Using the van der Pauw method and Hall effect measurements we find strong laminated conductivity at the implanted layer and a temperature dependent decoupling between the Ti implanted layer (TIL) and the substrate. The conduction mechanism from the TIL to the substrate shows blocking characteristics that could be well explained through IB theory.Usi… Show more

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Cited by 38 publications
(45 citation statements)
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“…In this way, the laser thermal annealing ͑LTA͒ process could be a technological key to obtain an IB in bulk semiconductors. 10,[14][15][16] The effect of the LTA process on III-V semiconductors has been reported previously. 17 However, as far as we are concerned no detailed study has been carried out on GaP.…”
Section: Introductionmentioning
confidence: 88%
“…In this way, the laser thermal annealing ͑LTA͒ process could be a technological key to obtain an IB in bulk semiconductors. 10,[14][15][16] The effect of the LTA process on III-V semiconductors has been reported previously. 17 However, as far as we are concerned no detailed study has been carried out on GaP.…”
Section: Introductionmentioning
confidence: 88%
“…The main difference between the model presented here and those previously reported 8,9 is the consideration of the current limitation between the implanted layer and the substrate introduced by the rectifying behavior of the implanted-substrate junction. The details dealing with this junction were previously reported in Ref.…”
Section: Introductionmentioning
confidence: 89%
“…8,9 In Ref. 8 we have highlighted an important aspect: the rectifying character of the IBS/n-Si substrate junction at low temperatures.…”
Section: Introductionmentioning
confidence: 99%
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