2006
DOI: 10.1063/1.2213214
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Electronic linearization of piezoelectric actuators and noise budget in scanning probe microscopy

Abstract: Quantitative scanning probe microscope topographies by charge linearization of the vertical actuator Rev. Sci. Instrum. 81, 103701 (2010); 10.1063/1.3488359 Vertical inertial sliding drive for coarse and fine approaches in scanning probe microscopy Rev. Sci. Instrum. 78, 036110 (2007); 10.1063/1.2712808Wideband and hysteresis-free regulation of piezoelectric actuator based on induced current for high-speed scanning probe microscopy Rev.The maximum resolution achievable with a scanning probe microscope is limit… Show more

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Cited by 8 publications
(4 citation statements)
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“…27 Other details of the instrument are reported and discussed in Ref. 28. The probes were electrochemically etched from a tungsten wire.…”
Section: Methodsmentioning
confidence: 99%
“…27 Other details of the instrument are reported and discussed in Ref. 28. The probes were electrochemically etched from a tungsten wire.…”
Section: Methodsmentioning
confidence: 99%
“…9 Therefore, scanning probes often have problems with interference from external noise sources, which can skew results and produce surface "features" that can be misperceived as real. 10 Knowledge of the frequency of these external noise sources is crucial for finding their origin in order to eliminate noise. 11 Spectrum analyzers are very useful for the measurement of both the magnitude and frequency of noise sources in SPM images, 12,13 but in general they tend to be relatively expensive.…”
Section: Introductionmentioning
confidence: 99%
“…8 Others have implemented methods to correct distortion Yothers, Browder, & Bumm Real-Space Distortion Correction of STM Images 3 / 38 from the piezoelectric actuators in real time, e.g. by modifying the image raster scan in the controller frame using behavioral models for the piezoelectric actuators [11][12][13][14] and the linearization of long-range hysteresis with software, 15 or by hardware linearization of the piezoelectric actuator response using charge control instead of voltage control. 16,17 All have proven effective for reducing distortion, although they can introduce new problems.…”
Section: Introductionmentioning
confidence: 99%