Abstract:Structural defects in aluminium nitride (AlN) get visible in panchromatic cathodoluminescence (CL) maps as luminescence at 340 nm and 630 nm is locally enhanced. Low‐angle grain boundaries (LAGBs) and dislocations can be detected as long as they are sufficiently decorated and the defect‐related contrast is higher than local variations in background CL intensity. We applied the method to c ‐plane and a ‐plane cuts of one of our off‐oriented grown AlN crystals and describe occurrence, routes, and dissolution int… Show more
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