Electron drift velocity in argon, nitrogen, hydrogen, oxygen and ammonia in strong electric fields determined from rf breakdown curves

Lisovskiy, Valeriy; Booth, Jean‐Paul; Landry, K.; Douai, D.; Cassagne, V.; Yegorenkov, Vladimir

doi:10.1088/0022-3727/39/4/011

Cited by 42 publications

(39 citation statements)

References 31 publications

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“…Within the rf voltage and pressure ranges we studied that SiH 4 rf breakdown curves possess two branches: the Paschen one (to the left of the ignition curve minima, at rf voltages U rf > 300 V), as well as a diffusion-drift one [25]. Similar to a number of other gases [24][25][26][27][28][29][30], diffusion-drift branch of rf breakdown curves of SiH 4 has a clearly expressed region of multi-valued dependence of the rf breakdown voltage on gas pressure (at low gas pressure). The reasons for such behaviour of rf breakdown curves are described in detail in papers [24][25][26][27][28][29][30], therefore we will not discuss it here.…”

Section: Resultsmentioning

confidence: 99%

Electron drift velocity in silane in strong electric fields determined from rf breakdown curves

Lisovskiy¹,

Booth²,

Landry³

et al. 2007

J. Phys. D: Appl. Phys.

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We report measurements of the breakdown curves of an rf capacitive discharge in low pressure silane. The electron drift velocity was determined from the locations of the turning point and of the minimum in the breakdown curves in the range E/p = 145-1292 V cm −1 Torr −1 . We compare our results to values calculated from the published cross-sections in the range E/p = 1-2000 V cm −1 Torr −1 and data calculated in other papers and find good agreement.

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Section: Resultsmentioning

confidence: 99%

Electron drift velocity in silane in strong electric fields determined from rf breakdown curves

Lisovskiy¹,

Booth²,

Landry³

et al. 2007

J. Phys. D: Appl. Phys.

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“…Therefore, the problem of α ion calculation within the basic algorithm remains relevant without restrictions on the medium. The formula ν ion = α ion V dr , where the drift velocity V dr is represented by di erent velocities, often appears in the literature (see, e.g., [9,12,18]). It is applicable only for small values of the parameter Ez/p.…”

Section: Calculation Of DI Usion Coe Cients and α Ionmentioning

confidence: 99%

“…Dependence of the drift velocity on Ez /p; solid line -Vz ; dotted line -Vc; points mark experimental data[5,12].…”

mentioning

confidence: 99%

Numerical statistical modelling algorithms for electron avalanches in gases

Lotova

Марченко

Mikhaı̆lov

et al. 2014

Russian Journal of Numerical Analysis and Mathematical Modelling

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A three-dimensional parallel algorithm of the Monte Carlo method (ELSHOW) is developed for simulation of electron avalanches in gases. The parallel implementation is performed with the use of the wellproven PARMONC library, which accelerates the calculations of such integral characteristics as the number of particles in an avalanche, the coe cient of impact ionization, the drift velocity, and the others, as well as ways to select an appropriate size of the time step using the technique of dependent statistical tests. The algorithm consists of special methods of distribution modelling, a lexicographic implementation scheme for 'branching' of trajectories, a 'Russian roulette', justi ed construction of histograms and a polygon of frequencies, and the calculation of probabilistic error estimate of functionals. A comparison of the obtained results for nitrogen with previously published theoretical and experimental data is presented.The development of computer technology brings the demand for software working correctly in the sixdimensional phase space of coordinates and velocities (x, y, z, Vx, Vy, Vz), in particular, for simulation of breakdown in gases. The base for such calculations is a basic algorithm calculating not the proper eld of electrons, but taking into account only the external eld. This model is applicable in the beginning of breakdown development when the number of electrons is small and their own eld is small compared to the external one.Simulating the motion of electrons (electron avalanche) in gases, one has to solve Boltzmann's equation with a power component. To do that, we use the Monte Carlo method [1, 3]. There are algorithms solving Boltzmann's equation by other methods (see, e.g., [4,8]).The Monte Carlo method allows us to simulate in a natural way such complex and improbable processes as a permanent acceleration of electrons in a gas, which are di cult to consider in other approaches. With all advantages of this method, it is necessary to pay a special attention to the fact that one has to store in computer memory the coordinates of a six-dimensional phase space for all the electrons of an avalanche, while the number of these electrons grows exponentially in time [9]. This problem can be partly resolved by the well-known lexicographic scheme of trajectory 'branching' (see Section 8 below) and the 'Russian roulette' (Section 1). However, a su cient gain in computation time can be obtained in practice due to a parallelization technology.The Monte Carlo method was also used previously to solve such problems. The most interesting for comparison algorithm was presented in [10]. It di ers in another set of cross-sections and in the application of the maximum cross-section method for simulation of a run. A similar algorithm for argon and oxygen in combination with the PIC-method was proposed in [23].The Monte Carlo algorithm presented here was implemented in the software code ELSHOW (ELectron SHOWer). In contrast with other algorithms, it uses a lexicographic scheme, a parallelization technology, ...

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“…which give a value of v d and µ e for argon as 3 x 10 6 cm/s and 3.3 x 10 2 cm 2 V −1 s −1 , respectively [22]. For the cylindrical surface corresponding to the radius r m current density was estimated as:…”

Section: Plasma Source Operationmentioning

confidence: 99%

An atmospheric pressure plasma source driven by a train of monopolar high voltage pulses superimposed to a dc voltage

Stoican¹

2011

Eur. Phys. J. Appl. Phys.

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Electron drift velocity in argon, nitrogen, hydrogen, oxygen and ammonia in strong electric fields determined from rf breakdown curves

Cited by 42 publications

References 31 publications

Electron drift velocity in silane in strong electric fields determined from rf breakdown curves

Electron drift velocity in silane in strong electric fields determined from rf breakdown curves

Numerical statistical modelling algorithms for electron avalanches in gases

An atmospheric pressure plasma source driven by a train of monopolar high voltage pulses superimposed to a dc voltage

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