“…They can be used as anatytical tools, photonic devices, in the surface treatment of vulnerable materials, bacterial inactivation processes, surface modification, chemical vapor deposition, plasma etching on films [8][9][10][11][12][13] . Characteristics of micro plasmas, such as neutral gas temperature, electron temperature, electron density, ion density, electric field and so on, play an important role in physical and chemical processes [14][15][16] . There are many studies concerning the relationship between the bulk gas temperature and control parameters, for example, discharge current and gas flux, where the gas temperature is estimated using radiative transitions of diatomic molecules [17][18][19][20][21][22] .…”