d method is proposed for calculating the electron effective mass in thin insulating films (less than 100 tf) from the tunnel-and Schottky currents. I n this method the slope of the Schottky characteristic provides the effective film thickness, and the slope of the tunnel characteric leads to the electron effective mass. It is shown that, for uneven films, this method may provide better results than the calculation using the capacitance film thickness. The method is used to calculate the electron effective mass in a thin Ta,O, film.Eine Methode zur Berechnung von effektiven Elektronenmassen in dannen Isolationsschichten (< 100 8 ) aus Messungen von Tunnelund Schottky-Stromen wird vorgeschla-