1983
DOI: 10.1016/0040-6090(83)90397-8
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Electron beam resists produced from monomer-polymer Langmuir-Blodgett films

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Cited by 64 publications
(8 citation statements)
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“…This can be related to the addition of SA required to fabricate LB films of these low‐bandgap polymers, while for drop‐cast deposition this is not a necessary step. Despite the lower conductivity achieved here for the LB mixed films compared to the drop‐cast neat films, it is important to mention that the LB technique allows thickness control of the films, a crucial factor in the performance or characterization of some devices, and requires less polymer to fabricate the films, both issues for spin‐coating or drop‐cast techniques. Furthermore, fine‐tuning the molecular architecture of thin films may lead to improvements in device efficiency depending on the intended application.…”
Section: Resultsmentioning
confidence: 90%
“…This can be related to the addition of SA required to fabricate LB films of these low‐bandgap polymers, while for drop‐cast deposition this is not a necessary step. Despite the lower conductivity achieved here for the LB mixed films compared to the drop‐cast neat films, it is important to mention that the LB technique allows thickness control of the films, a crucial factor in the performance or characterization of some devices, and requires less polymer to fabricate the films, both issues for spin‐coating or drop‐cast techniques. Furthermore, fine‐tuning the molecular architecture of thin films may lead to improvements in device efficiency depending on the intended application.…”
Section: Resultsmentioning
confidence: 90%
“…Conventional spinner coating method is not sufficient to fabricate patterns as fine as a 0.25 ~tm, because striation occurs during the spinner coating process. Recent studies to obtain sub-micron patterns on the LB films inidcate that thinner LB films are useful for resist to give finer resolution of the pattern [3][4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…Langmuir‐Blodgett deposition method (LB) is used to transfer Langmuir monolayers of amphiphilic molecules onto hydrophilic substrate such as glass and quartz14 semi‐conductors,15–17 mica18, 19 and oxidized metal surfaces 20. LB method is also effective for transferring monolayers on hydrophobic substrates such as hydrogen terminated or silanized Si21, 22 or silanized glass 23. Several investigations of gramicidin films at the air water interface have been conducted.…”
Section: Introductionmentioning
confidence: 99%