2020
DOI: 10.1021/acsami.9b19778
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Electron-Beam Patterning of Vapor-Deposited Solid Anisole

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Cited by 17 publications
(15 citation statements)
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“…A distinct group to mention is so-called ice lithography (IL) [161] using water [162,163] for positive tone patterning, and solid alkanes [164,165] and recently reported anisole [166] for a negative one. Unlike methods mentioned earlier, IL skips steps of resist coating and development in terms of utilization of any additional solvents.…”
Section: Ice Lithographymentioning
confidence: 99%
“…A distinct group to mention is so-called ice lithography (IL) [161] using water [162,163] for positive tone patterning, and solid alkanes [164,165] and recently reported anisole [166] for a negative one. Unlike methods mentioned earlier, IL skips steps of resist coating and development in terms of utilization of any additional solvents.…”
Section: Ice Lithographymentioning
confidence: 99%
“…Compared with the traditional Bosch process, DREM process has the advantage of good etching directionality and high etching selectivity and thus is favorable for etching high aspect ratio structures, 15 3D periodic structures, 16,17 and even tilted structures. 18,19 TABLE I. Overview of parameter settings of the in situ SADP process (the platen chiller temperature is 0°C during the entire process). The thickness of the FC film during deposition was measured in situ by OEI with an optical end point detection system (Verity Instruments) and verified with a spectroscopic ellipsometry system (VASE, J.…”
Section: A Fabrication Detailsmentioning
confidence: 99%
“…The creation of surface patterns using photolithography on polymers is well-established, 5 and techniques have been developed to deposit metal patterns on molecular crystals as well. 6 In order to modify the underlying crystal structure, focused ion beam 7,8 and electron beam methods [9][10][11][12][13][14][15] have been successfully used to pattern nano-and microscale features into organic and organometallic molecular solids. For cocrystals incorporating a volatile component, light can also be used to carve features into single crystals.…”
Section: Introductionmentioning
confidence: 99%