Abstract:This paper presents a novel technique for producing alumina ceramic coatings based on the evaporation of an aluminum oxide target by an electron beam in the middle vacuum range (5-30 Pa). The evaporation of ceramics by the electron beam enables to attain a coating deposition rate of up to 0.3 µm/min, and thus consider this as a practical alternative to existing methods. A special attention is devoted to the study of the surfaces of obtained coatings. The X-ray fluorescence analysis of the deposited coating sho… Show more
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