Electromechanical wavelength tuning of double-membrane photonic crystal cavities

Midolo, Leonardo; Veldhoven, van Pj René; Dündar, MA Mehmet; Nötzel, R.; Fiore, Andrea

doi:10.1063/1.3593963

Cited by 51 publications

(49 citation statements)

References 16 publications

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“…The ideal control method for semiconductor nanocavities would allow the ultrafast manipulation of the coupling rate g and/or of the cavity-loss rate κ, without directly affecting the population and the phase of the emitter. Although various methods for the control of semiconductor CQED systems have been demonstrated, for example by tuning the emitter or cavity frequency using electric field 7 , strain 8 or nanomechanical deformation 9,10 , none of these has been shown to provide the control of radiative processes on the required subnanosecond timescales. The fast wavelengthdetuning techniques theoretically proposed in Johnson et al 11 and Thyrrestrup et al 12 are extremely challenging to implement without directly perturbing the emitter's evolution, and are intrinsically associated with a wavelength chirp.…”

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confidence: 99%

Ultrafast non-local control of spontaneous emission

et al. 2014

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Solid-state cavity quantum electrodynamics systems will form scalable nodes of future quantum networks, allowing the storage, processing and retrieval of quantum bits, where a real-time control of the radiative interaction in the cavity is required to achieve high efficiency. We demonstrate here the dynamic molding of the vacuum field in a coupled-cavity system to achieve the ultrafast nonlocal modulation of spontaneous emission of quantum dots in photonic crystal cavities, on a timescale of ~200 ps, much faster than their natural radiative lifetimes. This opens the way to the ultrafast control of semiconductor-based cavity quantum electrodynamics systems for application in quantum interfaces and to a new class of ultrafast lasers based on nano-photonic cavities.

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confidence: 99%

Ultrafast non-local control of spontaneous emission

et al. 2014

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“…This leads to an opposite and reversible energy shift of the super-modes of the system. This concept has been implemented using laterally- [7][8][9] and vertically- [10] coupled PhC nanobeams and parallel two-dimensional PhC membranes [11].…”

Section: Introductionmentioning

confidence: 99%

Anti-stiction coating for mechanically tunable photonic crystal devices

Petruzzella¹,

Zobenica²,

Cotrufo³

et al. 2018

Opt. Express

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A method to avoid the stiction failure in nano-electro-opto-mechanical systems has been demonstrated by coating the system with an anti-stiction layer of Al 2 O 3 grown by atomic layer deposition techniques. The device based on a double-membrane photonic crystal cavity can be reversibly operated from the pull-in back to its release status. This enables to electrically switch the wavelength of a mode over ~50 nm with a potential modulation frequency above 2 MHz. These results pave the way to reliable nano-mechanical sensors and optical switches.

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“…5 On the other hand, several proposals have been adopted to tune the cavity spectrum, including thermal methods, 15 gas adsorption, 16 photochromic materials, 17 photo-oxidation, 18 free carrier injection, 19,20 and nano-electromechanical systems. [21][22][23] However, so far, the crucial goal of achieving a simultaneous energy control of an integrated emitter and its cavity has not been attained yet. In this letter we present a fully tuneable cavity-emitter system, where both the cavity and emitter wavelengths can be independently controlled in the same semiconductor device.…”

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confidence: 99%

“…22 To this end, an n-i-p diode realized across the membranes provides the electrostatic actuation when it is operated in reverse bias. The resulting nano-mechanical displacement modifies the effective index of the coupled modes of the double-membrane waveguide, leading to a blue(red)-shift of the vertically anti-symmetric (symmetric) modes.…”

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confidence: 99%

“…The release of the free standing structure is carried out by selectively removing the sacrificial layers via cold (1 C) HCl solution while keeping the Si 3 N 4 mask to avoid sticking arising from capillary forces. 22 Finally, the Si 3 N 4 layer is eliminated by isotropic O 2 -CF 4 plasma ashing. Figure 2 shows the scanning electron micrographs of the full device.…”

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confidence: 99%

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Fully tuneable, Purcell-enhanced solid-state quantum emitters

Petruzzella

Xia

Pagliano

et al. 2015

Applied Physics Letters

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We report the full energy control over a semiconductor cavity-emitter system, consisting of single Stark-tunable quantum dots embedded in mechanically reconfigurable photonic crystal membranes. A reversible wavelength tuning of the emitter over 7.5 nm as well as an 8.5 nm mode shift are realized on the same device. Harnessing these two electrical tuning mechanisms, a single exciton transition is brought on resonance with the cavity mode at several wavelengths, demonstrating a ten-fold enhancement of its spontaneous emission. These results open the way to bring several cavity-enhanced emitters mutually into resonance and therefore represent a key step towards scalable quantum photonic circuits featuring multiple sources of indistinguishable single photons. Last decade has witnessed pioneering advancements in the development of the elementary building blocks for envisioned quantum photonic circuits, 1 which may enable simulating problems, which are intractable on classical computers. 2,3 Efficient on-demand single-photon sources, obtained by coupling a quantum emitter to an optical cavity, represent one of these key building blocks. Additionally, cavity quantum electrodynamics (c-QED) offers a viable solution to create a coherent and efficient interface between light and matter qubits, as needed to establish entanglement between distant quantum emitters via a photonic channel. 4 Among its numerous solid-state implementations, quantum dots (QDs) embedded in semiconductor nano-resonators have emerged as one of the most promising integrated platforms, 5,6 specifically for the on-demand generation of single and entangled photons. 7 Coupling to photonic crystal cavities (PCCs) is notably attractive due to their engineerable electromagnetic environment which provides record quality factors (Q) in a wavelength-scale volume. 8 Indeed, the basic c-QED phenomena have been recently demonstrated, including Rabi splitting, 9 static 10 and dynamic 11,12 control of spontaneous emission and single-photon non-linearities. 13,14 Nevertheless, integrating and interconnecting multiple c-QED nodes within the same chip poses considerable scalability issues.One of the leading experimental challenges in this context resides in the spectral matching of multiple cavityemitter systems, which requires the deterministic control over the energy of both emitters and cavities. To this end, post-processing tuning strategies are imperative because of the QD inhomogeneous broadening and the intrinsic fabrication imperfections which spread the actual cavity resonance over several nanometers.Lately, a number of techniques based on electric, magnetic, temperature and strain control have been successfully employed to tune the emitters' energy. 5 On the other hand, several proposals have been adopted to tune the cavity spectrum, including thermal methods, 15 gas adsorption, 16 photochromic materials, 17 photo-oxidation, 18 free carrier injection, 19,20 and nano-electromechanical systems. [21][22][23] However, so far, the crucial goal of achieving a simu...

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Electromechanical wavelength tuning of double-membrane photonic crystal cavities

Abstract: Midolo, L.; Veldhoven, van, P.J.; Dundar, M.A.; Nötzel, R.; Fiore, A.

Cited by 51 publications

References 16 publications

Ultrafast non-local control of spontaneous emission

Ultrafast non-local control of spontaneous emission

Anti-stiction coating for mechanically tunable photonic crystal devices

Fully tuneable, Purcell-enhanced solid-state quantum emitters

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