Anti-stiction coating for mechanically tunable photonic crystal devices

Abstract

A method to avoid the stiction failure in nano-electro-opto-mechanical systems has been demonstrated by coating the system with an anti-stiction layer of Al 2 O 3 grown by atomic layer deposition techniques. The device based on a double-membrane photonic crystal cavity can be reversibly operated from the pull-in back to its release status. This enables to electrically switch the wavelength of a mode over ~50 nm with a potential modulation frequency above 2 MHz. These results pave the way to reliable nano-mechanical sensors and optical switches.

Nanomechanical single-photon routing

“…A possible solution could be passivating the device by depositing dielectric insulating layers such as aluminum oxide or hafnium oxide between the GaAs surface and the metal electrodes. This technique has also shown to be beneficial towards increasing the yield, by reducing failure due to electrostatic pull-in [8].…”

“…The development of a deterministic and coherent interface between a single photon and a single emitter, as recently demonstrated with atoms [7,8], defect centers [9], and quantum dots [10], leads to novel opportunities for quantum photonics. It enables constructing multi-photon sources [11], photon-photon quantum gates [12], nonlinear operations at the single-photon level [13], and the generation of multi-photon entangled cluster states [14].…”

A novel approach to construct self-assembled 3D MEMS arrays

“…Then restoring forces embedded via stress are not able to overcome the interfacial forces such as capillary, electrostatic, Casimir, and van der Waals (Maboudian 2001). Many strategies have been reported to overcome the stiction effect in MEMS, such as anti-stiction layers (Ashurst et al 2003;Petruzzella et al 2018), geometry effects or further material effects.…”

Transferring Einstein-Podolsky-Rosen State Cross Frequency Bands via Cavity Electro-Opto-Mechanical Converters

“…As it connects quantum behaviors of both optical regime and microwave regime via interaction with mechanical resonance, it shows potentials in preparing and observing quantum phenomena conveniently. In recent years, this excellent quantum platform has been widely studied and applied in various fields [1][2][3][4].…”