Electromechanical Modeling of MEMS-Based Piezoelectric Energy Harvesting Devices for Applications in Domestic Washing Machines

Abstract

Microelectromechanical system (MEMS)-based piezoelectric energy harvesting (PEH) devices can convert the mechanical vibrations of their surrounding environment into electrical energy for low-power sensors. This electrical energy is amplified when the operation resonant frequency of the PEH device matches with the vibration frequency of its surrounding environment. We present the electromechanical modeling of two MEMS-based PEH devices to transform the mechanical vibrations of domestic washing machines into electrical energy. These devices have resonant structures with a T shape, which are formed by an array of multilayer beams and a ultraviolet (UV)-resin seismic mass. The first layer is a substrate of polyethylene terephthalate (PET), the second and fourth layers are Al and Pt electrodes, and the third layer is piezoelectric material. Two different types of piezoelectric materials (ZnO and PZT-5A) are considered in the designs of PEH devices. The mechanical behavior of each PEH device is obtained using analytical models based on the Rayleigh–Ritz and Macaulay methods, as well as the Euler–Bernoulli beam theory. In addition, finite element method (FEM) models are developed to predict the electromechanical response of the PEH devices. The results of the mechanical behavior of these devices obtained with the analytical models agree well with those of the FEM models. The PEH devices of ZnO and PZT-5A can generate up to 1.97 and 1.35 µW with voltages of 545.32 and 45.10 mV, and load resistances of 151.12 and 1.5 kΩ, respectively. These PEH devices could supply power to internet of things (IoT) sensors of domestic washing machines.

Design and Modeling of a Magnetic-Coupling Monostable Piezoelectric Energy Harvester Under Vortex-Induced Vibration

“…Therefore, n is equal to one. Equation (14) can be rewritten as A1 is the amplitude of modal function, which can be obtained by the orthogonality conditions of mass and stiffness expressed as…”

“…Energy harvesting and converting technology have been developed in the recent 20 years, which is quite suitable for the above mentioned devices. Piezoelectric energy harvester (PEH) [11][12][13][14], electro-magnetic energy harvester [15,16], electrostatic energy generator [17,18], and dielectric elastomers energy harvester [19,20] are mainly the types of energy harvesting and converting technologies. Especially, the PEH has been studied extensively because of its high power density, no electro-magnetic interference, and stability.…”

Piezoelectric Response in WO3-x Thin Films by Aluminum Clustering

“…This has expanded the interest on properties such as electrochromism and piezoelectricity in various materials [10][11][12]. Piezoelectric materials have gained importance in modern day technology due their wide range of applications, from positioners in electronic microscopes, crystal oscillators, sound and vibration sensors, and energy harvesting devices [13][14][15][16][17][18][19]. Piezoelectricity occurs mainly in non-centrosymmetric structures [20]- [23], which refers to those lacking an inversion point, i.e., a point or atom position at speci c coordinates inside the Bravais unit cell, with respect to a crystallographic plane; in the spatial distribution this causes uneven distribution of electronic states and when a mechanical force is applied part of those accumulated electron charges are released, causing a piezoelectric response, as described extensively in the literature [21], [24]- [28].…”

Electromechanical Modeling of Vibration-Based Piezoelectric Nanogenerator with Multilayered Cross-Section for Low-Power Consumption Devices

“…Thus, the development of electromechanical models for nanogenerators are required to determine their best geometrical configurations and materials. Some researchers have reported analytical electromechanical models for piezoelectric micro and nanogenerators [ 37 , 38 , 39 , 40 ]. Martínez-Cisneros et al [ 37 ] presented the analytical electromechanical modeling of a piezoelectric microgenerator with T shape for applications in domestic washing machines.…”

“…Some researchers have reported analytical electromechanical models for piezoelectric micro and nanogenerators [ 37 , 38 , 39 , 40 ]. Martínez-Cisneros et al [ 37 ] presented the analytical electromechanical modeling of a piezoelectric microgenerator with T shape for applications in domestic washing machines. This modeling considers a resonator with two different multilayered cross-sections, but it is only suitable for single-clamped beams.…”