Electromechanical Analysis of a Piezoelectric Beam Used to Drive a Torsional Microactuator

Huang, Jin H.; Chen, Jhao-Ming; Shiah, Yui‐Chuin

doi:10.1177/1045389x06067294

Journal of Intelligent Material Systems and Structures

2007

DOI: 10.1177/1045389x06067294

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Electromechanical Analysis of a Piezoelectric Beam Used to Drive a Torsional Microactuator

Jin H. Huang

Jhao-Ming Chen²,

Yui‐Chuin Shiah

Abstract: The present paper is to analyze the electromechanical responses of a piezoelectric beam in a novel torsional microactuator designed for digital micromirror devices. With the capability of self-detecting rotating angles, the microactuator is designed to actuate high rotating angles when applied with a low voltage. Having laid the design foundation of such devices for the industry, the present work analyzes the electromechanical response of the piezoelectric beam used to drive the micromirror. An analytical expr… Show more

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Cited by 3 publications

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Polymeric piezoelectric cantilever and tubular actuators

2010

Polymers for Advanced Techs

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Electroactive polymers (EAPs) have attracted a great deal of attention in the last decade due to their unique properties that are applicable to many advanced applications. The present work aims to study the materials-property relationship of this class of materials, and thus facilitate the implementation of EAPs in more applications. The present work investigated the feasibility of adapting cantilever and tubular configurations to the polymeric piezoelectric actuators. The polarization and displacement of samples (fabricated from Poly(Vinyldene fluoridetrifluroethylene) [P(VDF-TrFE)] thin film) were measured under both dynamic and static driving conditions. The polarization loops for all the samples exhibit little hysteresis under weak field and the polarization changes linearly with voltage for most samples. The frequency-dependent polarization behavior is consistent with the previous reported work. The displacements for both cantilever and tubular samples are also noted to be in agreement with the theoretical prediction. Significant displacement (1079 mm) was achieved for samples, even under weak field (60 MV/m). In summary, the results have suggested that the relationship between geometric variables and the performance is also applicable to polymeric materials. Thus, the constitutive relationship can also be applied as a guideline for designing and optimizing the polymeric actuators beyond P(VDF-TrFE) copolymer materials. Figure 4. The dynamic displacement of sample S1A (15 Â 4 Â 0.22 mm 3 ) under a series of voltages; the bandwidth is indicated for the curve when the driving voltage is 500 V. This figure is available in color online atFigure 5. (a) The polarization and displacement for sample one, inset depicts the linear relationship at relatively low voltage; (b) polarization and displacement for sample one. This figure is available in color online at www.interscience.wiley.com/journal/pat Polym.

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Polymeric piezoelectric cantilever and tubular actuators

2010

Polymers for Advanced Techs

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Electromechanical analysis for a piezo-optical fiber subjected to harmonic loading

Huang

Ding

2007

Journal of Applied Physics

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This article investigates the electromechanical responses of a piezocoated optical fiber subjected to time-harmonic excitation of mechanical load as a sensor or to electric voltages as an actuator. Piezoelectric coatings, functioning as sensors or actuators, have potential in the development of acousto-optic devices. Despite the growing demand for optical fibers coated with piezoelectric materials, pertinent research work on their electromechanical responses in integrated systems still remains very scarce indeed. By application of Hamilton’s principle to piezoelectric fundamentals, the equations of motion under dynamic excitations are solved with proper boundary conditions to give the analytical forms of the integrated system’s electromechanical responses. For numerical illustration of the responses, an example is investigated to give the instantaneous response for the direct and converse effects.

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Acoustic analysis and fabrication of microelectromechanical system capacitive microphones

Her

Huang

2008

Journal of Applied Physics

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This paper presents a microelectromechanical system (MEMS) capacitive microphone fabricated by using a combination of surface and bulk micromachining techniques equipped with favorable integrated complementary metal-oxide semiconductor capability. Through the proposed equivalent circuit model for the packaged microphone, optimal diaphragm diameter, diaphragm thickness, backplate height, air gap, front chamber volume, back chamber height, and acoustic hole fraction have been determined by analyzing and simulating the capacitive microphone. Consequently, this design model can optimize choice of materials, microphone size, and microphone performance. All parameters for the analysis have been experimentally measured for the microphone. To verify our analysis, the microphone sensitivity has been experimentally measured by pulse electroacoustics with the software SOUND CHECK in an anechoic box. The simulation and experimental results for sensitivity of the microphone follow each other within a range of 2 dB. Moreover, the measured specifications indicate that the packaged microphone has notably high sensitivity (−42±3 dB V/Pa at 1 kHz), low power consumption (<250 μA), high S/N ratio (>55), and low distortion (<0.5%).

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Electromechanical Analysis of a Piezoelectric Beam Used to Drive a Torsional Microactuator

Cited by 3 publications

References 21 publications

Polymeric piezoelectric cantilever and tubular actuators

Polymeric piezoelectric cantilever and tubular actuators

Electromechanical analysis for a piezo-optical fiber subjected to harmonic loading

Acoustic analysis and fabrication of microelectromechanical system capacitive microphones

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