Electromagnetically actuated ball valve micropumps

Yamahata, Christophe; Lacharme, Frédéric; Matter, J.; Schnydrig, S.; Burri, Y.; Gijs, Martin A. M.

doi:10.1109/sensor.2005.1496391

Cited by 8 publications

(9 citation statements)

References 12 publications

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“…The PDMS ball-valve micropump made by Pan et al [7] which was actuated by a printed circuit board (PCB) microcoil has much lower efficiency than by micromotor. For our improved micropump system, we obtain efficiency of 0.06%, a factor 2 better compared to the previous work by Yamahata et al [14,15] at the same power consumption of 500 mW for the actuator. We can easily point out the advantages of our micropump system with respect to the literature reported results: (i) use of a low-cost material: PMMA, PDMS; (ii) easy fabrication method and modular assembly of the microfluidic and magnetic actuation circuit, meeting the requirement of industry; (iii) flat pumping geometry suitable for miniaturization; (iv) self-priming micropump, thanks to the use of magnetically actuated membrane with large deflection.…”

Section: Frequency-dependent Backpressurementioning

confidence: 57%

“…The microfabrication of the microfluidic chip is similar to that reported in our previous work [15]. In order to have stable pumping, self-priming and bubble tolerance of the pump, a flexible membrane with large deflection amplitude is mandatory [24].…”

Section: Magnetic Membrane Fabricationmentioning

confidence: 87%

“…The water flow rate for the ball-valve micropump actuated by the improved electromagnet is as high as 3.6 mL min −1 and 6.8 mL min −1 at 500 mW and 2 W actuation power, respectively. The backpressure amounts nearly to 40 kPa at 2 W. Thanks to the improved electromagnetic actuator, our micropump system has been considerably improved in terms of miniaturization and efficiency compared with previous work [8,14,15].…”

Section: Introductionmentioning

confidence: 96%

“…material [11] and an active electromagnetically actuated ball valve was realized in silicon/glass [12]. Recently, different PMMA ball-valve micropumps with either pneumatically [13] or electromagnetically actuated [8][9][10][14][15][16] membranes were reported. In the case of electromagnetic actuation, commercial electromagnets are commonly reported.…”

Section: Introductionmentioning

confidence: 99%

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A high-performance compact electromagnetic actuator for a PMMA ball-valve micropump

Shen

Yamahata²,

Gijs

2008

J. Micromech. Microeng.

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We present the microfabrication and characterization of a reciprocating-type poly(methylmetacrylate) (PMMA) ball-valve micropump which is actuated with a high-performance and compact electromagnetic circuit of centimeter size. We have improved by finite element calculations the magnetic design of the electromagnet that actuates a NdFeB permanent magnet embedded in a poly(dimethylsiloxane) (PDMS) pumping membrane. Powder blasting technology and conventional micromachining techniques are employed for the microstructuring of PMMA layers. The ball-valve micropump is bubble tolerant and has self-priming capabilities. It has a resonant frequency of around 20 Hz, and it exhibits a backpressure up to 37 kPa; water is pumped at flow rates up to 6.8 mL min −1 for a 2 W electromagnetic actuation power. The actuation frequency dependence of the flow rate can be well described by a fluidic damped oscillator model.

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Section: Frequency-dependent Backpressurementioning

confidence: 57%

Section: Magnetic Membrane Fabricationmentioning

confidence: 87%

Section: Introductionmentioning

confidence: 96%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A high-performance compact electromagnetic actuator for a PMMA ball-valve micropump

Shen

Yamahata²,

Gijs

2008

J. Micromech. Microeng.

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“…A typical configuration consists of one actuated membrane and two passive valves for flow rectification [7][8][9][10][11][12]. Another popular setup features three or more membranes placed in a serial fashion which is commonly referred to as peristaltic actuation [1,[13][14][15][16][17][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

Geophysical turbulence

Monin¹

1983

Russ. Math. Surv.

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A novel design of a piezoelectric silicon micropump is proposed, which provides a constant flow rate over a wide backpressure range of up to 30 kPa. This highly appreciable feature is based on a new serial arrangement of two active valves and relies on both an appropriate electrical actuation sequence of the piezo-actuators and an immanent limitation of the membrane deflection by the valve seats. The design is optimized for the low flow regime ranging from 0.1 to 50 µl min −1 . A detailed lumped-parameter model is derived in order to reveal the physics behind this pumping principle and to identify the optimum control scheme. For the fabrication of our device, a comparably simple and robust 2-wafer process is utilized. A thorough experimental investigation demonstrates the high performance of the micropump. The backpressure independence of the flow rate enables high-resolution volumetric dosing within the aforementioned flow range. The stroke volume and hence the resolution of the micropump is adjustable via the upstroke voltage of the actuator between 50 and 200 nl. Depending on this setting typical actuation frequencies range from 0.05 to 5 Hz and the flow rate scales proportional to the frequency within that frequency range.

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A magnetically driven PDMS micropump with ball check-valves

Pan

McDonald

Kai

et al. 2005

J. Micromech. Microeng.

142

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In this paper, we present a low-cost, PDMS-membrane micropump with two one-way ball check-valves for lab-on-a-chip and microfluidic applications. The micropump consists of two functional PDMS layers, one holding the ball check-valves and an actuating chamber, and the other covering the chamber and holding a miniature permanent magnet on top for actuation. An additional PDMS layer is used to cover the top magnet, and thereby encapsulate the entire device. A simple approach was used to assemble a high-performance ball check-valve using a micropipette and heat shrink tubing. The micropump can be driven by an external magnetic force provided by another permanent magnet or an integrated coil. In the first driving scheme, a small dc motor (6 mm in diameter and 15 mm in length) with a neodymium-iron-boron permanent magnet embedded in its shaft was used to actuate the membrane-mounted magnet. This driving method yielded a large pumping rate with very low power consumption. A maximum pumping rate of 774 µL min −1 for deionized water was achieved at the input power of 13 mW, the highest pumping rate reported in the literature for micropumps at such power consumptions. Alternatively, we actuated the micropump with a 10-turn planar coil fabricated on a PC board. This method resulted in a higher pumping rate of 1 mL min −1 for deionized water. Although more integratable and compact, the planar microcoil driving technique has a much higher power consumption.

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Electromagnetically actuated ball valve micropumps

Cited by 8 publications

References 12 publications

A high-performance compact electromagnetic actuator for a PMMA ball-valve micropump

A high-performance compact electromagnetic actuator for a PMMA ball-valve micropump

Geophysical turbulence

A magnetically driven PDMS micropump with ball check-valves

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