2008
DOI: 10.1088/0960-1317/18/2/025031
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A high-performance compact electromagnetic actuator for a PMMA ball-valve micropump

Abstract: We present the microfabrication and characterization of a reciprocating-type poly(methylmetacrylate) (PMMA) ball-valve micropump which is actuated with a high-performance and compact electromagnetic circuit of centimeter size. We have improved by finite element calculations the magnetic design of the electromagnet that actuates a NdFeB permanent magnet embedded in a poly(dimethylsiloxane) (PDMS) pumping membrane. Powder blasting technology and conventional micromachining techniques are employed for the microst… Show more

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Cited by 30 publications
(19 citation statements)
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“…The micropumps exert pressure on the working fluid through moving wall or continuously add energy to the working fluid by means of piezoelectric (Laser & Santiago 2006;Michael et al 1998), electrostatic (Machauf et al 2005, pneumatic (Yang & Liao 2009), and magnetic (Hatch et al 2001;Shen et al 2008) principles. However, previous micropumps should be integrated with external power or energy in operation, such as on-line electrical power or off-line batteries.…”
Section: Introductionmentioning
confidence: 99%
“…The micropumps exert pressure on the working fluid through moving wall or continuously add energy to the working fluid by means of piezoelectric (Laser & Santiago 2006;Michael et al 1998), electrostatic (Machauf et al 2005, pneumatic (Yang & Liao 2009), and magnetic (Hatch et al 2001;Shen et al 2008) principles. However, previous micropumps should be integrated with external power or energy in operation, such as on-line electrical power or off-line batteries.…”
Section: Introductionmentioning
confidence: 99%
“…Fig. 10 in [10]. Physical phenomena concerning this damping in these kind of microfluidic devices have been identified.…”
Section: Discussionmentioning
confidence: 89%
“…Model of lens focusing dynamics: We also calculated a theoretical 3-dB frequency of the vari-focal objective lens by using a simple RLC model developed by Shen et. al [18]. In this approach, the vari-focal objective lens was modeled as a serial circuit of a resistor (water viscosity), an inductor (water inertia), and a capacitor (PDMS membrane stiffiness).…”
Section: Performance Testmentioning
confidence: 99%