Electromagnetic Micro-Actuator with Silicon Membrane for Fluids Pump in Drug Delivery System

Pawinanto, Roer Eka; Yunas, Jumril; Alwani, Aliyah; Indah, Nur; Alva, Sagir

doi:10.18178/ijmerr.8.4.576-579

Cited by 6 publications

(2 citation statements)

References 3 publications

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“…This type of actuators has been used in various MEMS applications given its advantages such as simple drive mode, high field energy density, fast response time, and large deflection that are attainable with low input voltages [31,32]. Their applications extend to micro positioning systems [97], micromirrors [98, 99], microgrippers [100], and microfluidics [23,101] for micropumps [102, 103] and microvalves [104]. Electromagnetic actuators also exhibit common disadvantages, e.g.…”

Section: Electromagnetic Actuatorsmentioning

confidence: 99%

“…Serving as core architectural elements, MEMS actuators have emerged as a promising technology that plays a vital role in enabling a wide range of biomedical devices. Among existing MEMS actuators, those with thermoresponsive [22], electromagnetic [23], piezoelectric [24], thermopneumatic [25], and pneumatic [26] mechanisms have been some of the representative types widely used for biomedical applications. Each of these actuator types possesses attractive features.…”

Section: Introductionmentioning

confidence: 99%

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MEMS actuators for biomedical applications: a review

Ghazali

Hasan

Rehman

et al. 2020

J. Micromech. Microeng.

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Micro-electromechanical-system (MEMS) based actuators, which transduce certain domains of energy into mechanical movements in the microscopic scale, are increasingly contributing to the areas of biomedical engineering and healthcare applications. They are enabling new functionalities in biomedical devices through their unique miniaturized features. An effective selection of a particular actuator, among a wide range of actuator types available in the MEMS field, needs to be made through the assessment of many factors involved in both the actuator itself and the target application. This paper presents an overview of the state-of-the-art MEMS actuators that have been developed for biomedical applications. The actuation methods, working principle, and imperative features of these actuators are discussed along with their specific applications. An emphasis of this review is placed on temperature-responsive, electromagnetic, piezoelectric, and fluid-driven actuators towards various application areas including lab-on-a-chip, drug delivery systems, cardiac devices and surgical tools. It also highlights the key issues of MEMS actuators in light of biomedical applications.

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Section: Electromagnetic Actuatorsmentioning

confidence: 99%