Abstract:The adhesion, friction, wear in micro system or MEMS is more significant than those in macro system. The levitation or suspension technique is one of the effective techniques to eliminate the adhesion, friction, wear caused by the surfaces contact. The electromagnetic levitation micromotor with stators embedded (ELMSE) is a kind electromagnetic eddy current levitation system, which has special structure including the double sided stator and the hollow annular rotor. Different from the electromagnetic eddy curr… Show more
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