Motion control of a magnetically levitated microrobot using magnetic flux measurement

This paper introduces a novel micro-domain force estimation method for applications in a magnetic-haptic micromanipulation platform (MHMP). The MHMP employs the magnetic levitation technology in micro-domain worlds for ultra-high precision micromanipulation. In the MHMP, a microrobot that consists of a magnetic head and a body that includes electronic parts and an end-effector is manipulated by regulating an external magnetic field. The MHMP has been equipped with a haptic technology to allow a human operator to feel micro-domain environments and to intervene in dexterous tasks due to the poor knowledge from micro-worlds. To preserve a high feeling of a micro-domain environment for a human operator, the applied force/torque from the environment to the microrobot are required to be directly measured by specific sensors. Due to the size restriction, attaching force sensors to our microrobot is impractical. Therefore, we use a combination of Hall-effect sensor in the structure of the MHMP to estimate a single-axis force, eliminating the need for sensors on the microrobot. The Hall-sensors measure the magnetic flux and determine the location of the horizontally zero magnetic field gradient, B max location. It was realized that the applied force from the environment to the microrobot is linearly proportional to the distance of the microrobot from the B max location. The magnetic force which is equal to the environment force is calibrated using a cantilever deflection. The developed micro-domain force estimation method is verified experimentally, and it was demonstrated that this method has promising potential in estimating the environmental force applied to the microrobot in a non-contact way.

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“…5 The Hall-effect sensors are attached to a measurement stick and installed on the bottom of pole-piece (18) …”

Section: Journal Of Advanced Mechanical Design Systems and Manufactmentioning

confidence: 99%

Micro-Domain Force Estimation Using Hall-Effect Sensors for a Magnetic Microrobotic Station

Mehrtash

Khamesee

2013

JAMDSM

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“…6-DoF magnetically levitated actuators (MLAs) have been increasingly used in micro-assembly, micro-fabrication, and semiconductor manufacturing [1][2][3][4] because the moving part is capable of undertaking the large motion range in each direction benefiting from the characteristics of non-connect. The performance of the MLA system is mainly determined by the physical properties [5,6] and the performance of the control system [7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Simulation of a Synchronous Planar Magnetically Levitated Motion System Based on a Real-Time Analytical Force Model

et al. 2020

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The existing simulation method for the control of linear or planar magnetically levitated actuators always ignores the characteristics of the real physical object, which deteriorates the accuracy of the simulation. In this work, the proposed emulator for the magnetically levitated actuator is developed to consider both the force characteristics and the control algorithm. To model the real controlled object, the mathematical model for 1D (one-dimensional) and 2D (two-dimensional) magnetic arrays is derived where the yaw angle is taken into consideration using the coordinate transformation. The solution of the mathematical model is compared with the commercial BEM (boundary element method) software and the measurements from a force and torque testing setup to highlight the accuracy of the proposed mathematical model. Compared with the traditional simulation method of the motion control systems founded on the simplified system transfer function, the proposed simulation method has higher consistency and is closer to reality. The accuracy and efficiency of the proposed magnetic force model are further verified by the emulator based on the numerical force model and the testing data of the real setup.

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Design and optimization of a novel magnetically-actuated micromanipulator

2016

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Motion control of a magnetically levitated microrobot using magnetic flux measurement

Cited by 7 publications

References 20 publications

Micro-Domain Force Estimation Using Hall-Effect Sensors for a Magnetic Microrobotic Station

Micro-Domain Force Estimation Using Hall-Effect Sensors for a Magnetic Microrobotic Station

Simulation of a Synchronous Planar Magnetically Levitated Motion System Based on a Real-Time Analytical Force Model

Design and optimization of a novel magnetically-actuated micromanipulator

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