2008
DOI: 10.1063/1.3003867
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Electroluminescence from silicon-rich nitride/silicon superlattice structures

Abstract: Luminescent silicon-rich nitride/silicon superlattice structures ͑SRN/Si-SLs͒ with different silicon concentrations were fabricated by direct magnetron cosputtering deposition. Rapid thermal annealing at 700°C resulted in the nucleation of small amorphous Si clusters that emit at 800 nm under both optical and electrical excitations. The electrical transport mechanism and the electroluminescence ͑EL͒ of SRN/Si-SLs have been investigated. Devices with low turn-on voltage ͑6 V͒ have been demonstrated and the EL m… Show more

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Cited by 67 publications
(67 citation statements)
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References 18 publications
(25 reference statements)
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“…3(a), such a change in the conduction regime can be appreciated in the change of slope of the J-V curves at 15-20V for A1. A SCLC type of conduction has been reported for SRSN by Warga et al [23]. Following this equation, we find an electron mobility of 1.25 x 10 5 cm 2 /(V·s) which is one order of magnitude lower than the value reported in ref [24] for Si nitrides.…”
Section: Electro-optical Characterizationcontrasting
confidence: 43%
“…3(a), such a change in the conduction regime can be appreciated in the change of slope of the J-V curves at 15-20V for A1. A SCLC type of conduction has been reported for SRSN by Warga et al [23]. Following this equation, we find an electron mobility of 1.25 x 10 5 cm 2 /(V·s) which is one order of magnitude lower than the value reported in ref [24] for Si nitrides.…”
Section: Electro-optical Characterizationcontrasting
confidence: 43%
“…Intrinsic emission has been also observed in SRN ilms [27][28][29][30][31]. For example, an orange emission at 600 nm was observed at room temperature and has been related to the electron-hole pairs' recombination within Si-nps [27].…”
Section: Introductionmentioning
confidence: 73%
“…Red-near infrared EL (800 nm) has been reported in superlatices combining SRN and SiO 2 ilms and explained by the bipolar recombination of electron-hole pairs in Si-nps present within the SRN ilms [31]. A yellow EL emission has been reported when an SRO ilm instead of SiO 2 layer is used in the multilayer structure [32].…”
Section: Introductionmentioning
confidence: 94%
“…In these samples, the emission is enhanced relative to the emission from bulk Si because of electron-hole localization effects due to either quantum confinement or trapping to surface states [11]. In addition, significant work has been conducted to study electrical injection of the Si-NCs in both oxide and nitride systems [12]- [14]. We also explore a material system with Er in amorphous silicon nitride, which emits at the telecom wavelength of 1530 nm, ideally suited for on-chip Si photonics applications [15], [16].…”
Section: Introductionmentioning
confidence: 99%
“…However, it is possible to enhance the pumping of Er ions in amorphous silicon nitride by taking advantage of an efficient, nanosecondfast energy transfer from the matrix, which has four orders of magnitude larger absorption cross section than direct excitation of Er ions [15]- [17]. Since SRN layers can be electrically injected more efficiently than oxide-based dielectric matrices [14], it should also be possible to electrically excite Er ions in this configuration, paving a path to electrically pumped sources at the telecom wavelength.…”
Section: Introductionmentioning
confidence: 99%