Electrohydrodynamic jet printing of PZT thick film micro-scale structures

Wang, D.; Zhu, Xianglong; Liang, Junsheng; Ren, Tongqun; Zha, Wen; Dong, Wei; Rocks, Sophie A.; Dorey, Robert; Xu, Zheng; Wang, X.

doi:10.1016/j.jeurceramsoc.2015.05.013

Cited by 22 publications

(14 citation statements)

References 39 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The printing composite slurry used for making the PZT thick film element was prepared by thoroughly mixing the PZT powder and PZT sol. The details of the properties as well as the proportions of the composite slurry were described in previous studies [ 32 , 34 ]. Here, the slurry with a 1:1 ratio of PZT sol: PZT powder that was ball milled for 50 h was selected for the preparation of the printing material.…”

Section: Methodsmentioning

confidence: 99%

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

et al. 2021

View full text Add to dashboard Cite

This paper proposes a novel way of preparing a PZT thick film micro vibrator using the electrohydrodynamic jet (E-Jet) printing technique. Initially, a micro piezoelectric vibrator was simulated and designed for obtaining optimized structure, which has a total thickness of less than 600 µm. Subsequently, the PZT thick film element was directly printed on the elastic body using the E-Jet printing. This method avoids the glue fabrication process involved in the bulk piezoelectric fabrication, thus avoiding the limits of voltage drops, isolating and absorbing amplitude usually occurred in the vibrator having glue interface. It was observed that B02 and B03 modes were generated at frequencies of 29.74 and 79.14 kHz, respectively, and the amplitudes of B02 and B03 modes were 406 and 176 nm, respectively. The error between the simulation and test result in the B03 modal is only 0.35%, which indicates the accuracy of the simulation analysis and the fabrication process. The PZT thick film traveling-wave micro vibrator successfully realized bidirectional rotation of a rotor, with a maximum speed of 681 rpm, which also shows a linear relationship between excitation voltage and rotary speed. This paper provides an effective method for preparing a micro piezoelectric vibrator for MEMS ultrasonic devices, which simplifies the manufacturing process and enhances the performance of the piezoelectric vibrator.

show abstract

Section: Methodsmentioning

confidence: 99%

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

et al. 2021

View full text Add to dashboard Cite

show abstract

“…Dicing is commonly used to cut or engrave piezoelectric ceramic in patterns, but risks breaking the brittle ceramic. Recently, printing technology provides a facile way to pattern the slurry [ 31 ] of piezoelectric particles or sol-gel before they are sintered into piezoelectric ceramic.…”

Section: Printable Materialsmentioning

confidence: 99%

Ink-Jet Printing of Micro-Electro-Mechanical Systems (MEMS)

Lau

Shrestha

2017

Micromachines

View full text Add to dashboard Cite

Beyond printing text on paper, inkjet printing methods have recently been applied to print passive electrical and optical microparts, such as conductors, resistors, solder bumps and polymeric micro lenses. They are also useful to print micro-electro-mechanical systems (MEMS) as sub-millimeter sensor and actuator arrays, such as multifunctional skins applicable to robotic application and ambient monitoring. This paper presents the latest review of a few successful cases of printable MEMS devices. This review shows that inkjet printing is good for printing two-dimensional or surface MEMS devices from a small unit to an array over a large area. In the future, three-dimensional printing of multi-materials, from metal, plastic, to ceramic, will open the possibility of realizing more variety and function of a large-areal MEMS array, for a mobile electro-mechanical systems.

show abstract

“…Piezoresistive effect ensures that analog electrical resistance signal is extracted based on the principle that electrical conductive wires will respond to alteration in resistance when subjected to stress. Piezoelectricity defines the ability of certain materials to generate an electric charge in response to applied mechanical stress (Wang, Zhu, Liang, Ren, Zha, Dong, Rocks, Dorey, Xu and Wang, 2015).…”

Section: Introductionmentioning

confidence: 99%

A comparative study of knitted strain sensors fabricated with conductive composite and coated yarns

Raji

Miao

Zhang

et al. 2019

IJCST

View full text Add to dashboard Cite

Purpose The use of conductive yarns or wires to design and construct fabric-based strain sensors is a research area that is gaining much attention in recent years. This is based on a profound theory that conductive yarns will have a variation in resistance if subjected to tension. What is not clear is to which types of conductive yarns are most suited to delivering the right sensitivity. The purpose of this paper is to look at strain sensors knitted with conductive composite and coated yarns which include core spun, blended, coated and commingled yarns. The conductive components are stainless steel and silver coating respectively with polyester as the nonconductive part. Using Stoll CMS 530 flat knitting machine, five samples each were knitted with the mentioned yarn categories using 1×1 rib structure. Sensitivity tests were carried out on the samples. Piezoresistive response of the samples reveals that yarns with heterogeneous external structures showed both an increase and a decrease in resistance, whereas those with homogenous structures responded linearly to stress. Stainless steel based yarns also had higher piezoresistive range compared to the silver-coated ones. However, comparing all the knitted samples, silver-coated yarn (SCY) proved to be more suitable for strain sensor as its response to tension was unidirectional with an appreciable range of change in resistance. Design/methodology/approach Conductive composite yarns, namely, core spun yarn (CSY1), core spun yarn (CSY2), silver-coated blended yarn (SCBY), staple fiber blended yarn (SFBY) and commingled yarn (CMY) were sourced based on specifications and used to knit strain sensor samples. Electro-mechanical properties were investigated by stretching on a fabric tensile machine to ascertain their suitability for a textile strain sensor. Findings In order to generate usable signal for a strain sensor for a conductive yarn, it must have persistent and consistent conductive links, both externally and internally. In the case of composite yarns such as SFBY, SCBY and CMY where there were no consistent alignment and inter-yarn contact, resistance change fluctuated. Among all six different types of yarns used, SCY presented the most suitable result as its response to tension was unidirectional with an appreciable range of change in resistance. Originality/value This is an original research carried out by the authors who studied the electro-mechanical properties of some composite conductive yarns that have not been studied before in textile strain sensor research. Detailed research methods, results and interpretation of the results have thus been presented.

show abstract

Electrohydrodynamic jet printing of PZT thick film micro-scale structures

Cited by 22 publications

References 39 publications

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

Ink-Jet Printing of Micro-Electro-Mechanical Systems (MEMS)

A comparative study of knitted strain sensors fabricated with conductive composite and coated yarns

Contact Info

Product

Resources

About