Electrochemical Synthesis of Ceramic Materials. 4. Electrophoretic Deposition of Metal Nitride Ceramic Precursors

Abstract

We have prepared metal nitride ceramic precursors by anodic dissolution of the corresponding metal in liquid NH3 electrolyte solutions and then deposited coatings of these precursors onto n-Si substrates by electrophoresis. X-ray diffraction and electron microscopy indicate that calcination of the precursor-coated substrates yields coatings of AlN, δ-NbN, and Ni3N. Precursor coatings are formed by applying fields greater than 10 V/cm between electrodes in a CH3CN suspension of the precursor. The positively charged precursor particles deposit selectively on the cathode. Subsequent calcination in flowing NH3 or Ar yields the metal nitride coating. The Ni3N coating was prepared by calcining the precursor at 375 °C in NH3, while the AlN and NbN precursor coatings were prepared by calcination at 1100 °C in NH3 and 800 °C in Ar, respectively.

Electrophoretic Deposition of Aluminum Nitride from Its Suspension in Acetylacetone Using Iodine as an Additive

“…e theoretical and experimental development of the technique has also been reviewed by Heavens [19]. Various reports have appeared in the literature on the application of the technique for ceramic coatings [18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37].…”

“…Wade and Crooks [27,28] electrophoretically deposited AlN polymer precursor on n-Si cathode from a suspension in CH 3 CN and calcined the deposited �lm at a temperature of 1100 C in �owing NH 3 to AlN ceramic coating. Our work [29,30] has shown that electrophoretic deposition can be performed from the suspension of AlN in acetylacetone using iodine as an additive…”