Abstract:We have studied electrophoretic deposition of AlN from its suspension in acetylacetone with I2as an additive. AlN powder with particle size <10 μm is dispersed to produce a positive charge and deposited on the cathode by applying fields greater than 10 V/cm between the electrodes. X-ray diffraction and FTIR studies indicate that the AlN before and after deposition has the same composition and structure. An increase in the amount of AlN in the suspension, the deposition potential, and the deposition time res… Show more
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