Electroactive passivation of high power semiconductor devices with punch through design by hydrogenated amorphous carbon layers (a-C:H)

Barthelmess, R.; Beuermann, Max; Metzner, D.; Schmidt, Gordon; Westerholt, D.; Winter, N. W.; Gerstenmaier, Y.C.; Reznik, D.; Ruff, M.; Schulze, Hans‐Joachim; Willmeroth, A.

doi:10.1109/ispsd.1998.702664

Cited by 7 publications

(3 citation statements)

References 5 publications

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“…In addition to the plain mechanical properties, DLC based nanocomposites can be considered as functional materials with a wide range of applications as the physical properties of the films like refractive index, optical transmittance in a broad optical spectrum, including visible light and near IR ranges, as well as electrical properties can be varied in a wide range via appropriately chosen deposition conditions. This leads to different fields of applications such as optical windows, magn etic storage disks, bar code scanners, various mechanics, car parts, solid lubricants, biomedical coatings and microelectromechanical devices [46,54,55], piezo resistive sensors [20,56,57], microwave switches [58] and electrically active high power device passivation films [59].…”

Section: Introductionmentioning

confidence: 99%

Diamond like carbon nanocomposites with embedded metallic nanoparticles

Tamulevičius¹,

Meškinis

Tamulevičius

et al. 2018

Rep. Prog. Phys.

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In this work we present an overview on structure formation, optical and electrical properties of diamond like carbon (DLC) based metal nanocomposites deposited by reactive magnetron sputtering and treated by plasma and laser ablation methods. The influence of deposition mode and other technological conditions on the properties of the nanosized filler, matrix components and composition were studied systematically in relation to the final properties of the nanocomposites. Applications of the nanocomposites in the development of novel biosensors combining resonance response of wave guiding structures in DLC based nanocomposites as well as plasmonic effects are also presented.

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Section: Introductionmentioning

confidence: 99%

Diamond like carbon nanocomposites with embedded metallic nanoparticles

Tamulevičius¹,

Meškinis

Tamulevičius

et al. 2018

Rep. Prog. Phys.

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“…DLC films are deposited at room temperature by using a wide variety of the plasma based vacuum deposition processes that are compatible with the semiconductor device technology. This leads to different fields of applications such as optical windows, magnetic storage disks, bar code scanners, various mechanics, car parts, solid lubricants, biomedical coatings and micro-electromechanical devices [ 13 , 15 , 17 ], piezoresistive sensors [ 18 – 20 ], microwave switches [ 21 ], and electrically active high-power device passivation films [ 22 ]. DLC matrix was proved as an excellent matrix for metal nanoparticles being able to prevent nanoparticles from chemical and mechanical hazards.…”

Section: Introductionmentioning

confidence: 99%

Photovoltaic Properties and Ultrafast Plasmon Relaxation Dynamics of Diamond-Like Carbon Nanocomposite Films with Embedded Ag Nanoparticles

et al. 2017

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Ultrafast relaxation dynamics of diamond-like carbon (DLC) films with embedded Ag nanoparticles (DLC:Ag) and photovoltaic properties of heterojunctions consisting of DLC:Ag and crystalline silicon (DLC:Ag/Si) were investigated by means of transient absorption (TAS) spectroscopy and photovoltaic measurements. The heterojunctions using both p type and n type silicon were studied. It was found that TAS spectra of DLC:Ag films were dependent on the used excitation wavelength. At wavelengths where Ag nanoparticles absorbed light most intensively, only DLC signal was registered. This result is in good accordance with an increase of the DLC:Ag/Si heterojunction short circuit current and open circuit voltage with the excitation wavelength in the photovoltaic measurements. The dependence of the TAS spectra of DLC:Ag films and photovoltaic properties of DLC:Ag/Si heterostructures on the excitation wavelength was explained as a result of trapping of the photoexcited hot charge carriers in DLC matrix. The negative photovoltaic effect was observed for DLC:Ag/p-Si heterostructures and positive (“conventional”) for DLC:Ag/n-Si ones. It was explained by the excitation of hot plasmonic holes in the Ag nanoparticles embedded into DLC matrix. Some decrease of DLC:Ag/Si heterostructures photovoltage as well as photocurrent with DLC:Ag film thickness was observed, indicating role of the interface in the charge transfer process of photocarriers excited in Ag nanoparticles.

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“…Diamond like carbon (DLC) films received significant attention due to their outstanding mechanical, electrical and optical properties [1]. Particularly, present and prospective electronic applications of DLC films include electrically active passivation of high power electronics devices [2], material for fabrication of the membranes in microelectromechanical systems (MEMS) [3], piezoresistive [4 -6] and electrochemical sensors [7]. Recently fabrication of the diamond like carbon based resonant tunnel diodes (RTD) operating at microwave frequencies range was reported in [8,9].…”

Section: Introduction *mentioning

confidence: 99%

Negative Resistance Effect and Charge Transfer Mechanisms in the lon Beam Deposited Diamond Like Carbon Superlattices

Vasiliauskas

Meškinis

Tamulevičius

1970

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In the present study DLC:SiO_x/DLC/DLC:SiO_x/nSi and DLC:SiO_x/DLC/DLC:SiO_x/pSi structures were fabricated by ion beam deposition using a closed drift ion source. Current-voltage (I-V) characteristics of the multilayer samples were measured at room temperature. The main charge transfer mechanisms were considered. Unstable negative resistance effect was observed for some DLC:SiO_x/DLC/DLC:SiO_x/nSi and DLC:SiO_x/DLC/DLC:SiO_x/pSi structures. In the case of the diamond like carbon superlattices fabricated on nSi it was observed only during the first measurement. In the case of the some DLC:SiO_x/DLC/DLC:SiO_x/pSi negative resistance "withstood" several measurements. Changes of the charge carrier mechanisms were observed along with the dissapear of the negative resistance peaks. It seems, that in such a case influence of the bulk related charge transfer mechanisms such as Poole-Frenkel emission increased, while the influence of the contact limited charge transfer mechanisms such as Schottky emission decreased. Observed results were be explained by current flow through the local microconducting channels and subsequent destruction of the localized current pathways as a result of the heating by flowing electric current.

http://dx.doi.org/10.5755/j01.ms.17.1.240

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Electroactive passivation of high power semiconductor devices with punch through design by hydrogenated amorphous carbon layers (a-C:H)

Cited by 7 publications

References 5 publications

Diamond like carbon nanocomposites with embedded metallic nanoparticles

Diamond like carbon nanocomposites with embedded metallic nanoparticles

Photovoltaic Properties and Ultrafast Plasmon Relaxation Dynamics of Diamond-Like Carbon Nanocomposite Films with Embedded Ag Nanoparticles

Negative Resistance Effect and Charge Transfer Mechanisms in the lon Beam Deposited Diamond Like Carbon Superlattices

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