Electro-Spark Nanomachining Process Simulation

Pour, Gh. Tahmasebi; Pour, Y. Tahmasebi; Ghoreishi, M.

doi:10.7763/ijmmm.2014.v2.94

Cited by 5 publications

(4 citation statements)

References 10 publications

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“…The fabrication process of the steel structure of the proposed piezomotor was consisted of the heat treatment, wire electrical discharge machining and precise surface finishing processes. The EDM process can be used for micro-fabrication [39,40] and nano-fabrication [41][42][43][44][45].…”

Section: Clamp and Feeder Structural Designmentioning

confidence: 99%

A novel high performance integrated two-axis inchworm piezoelectric motor

Tahmasebipour

Sangchap

2019

Smart Mater. Struct.

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In all of the actuating mechanisms for the precision positioning systems such as compliant, inertial, ultrasonic and inchworm, the lack of an integrated precision positioning system with high stroke and multi-axis operation is felt. In this paper, a state-of-the-art integrated two-axis inchworm piezomotor with an innovative operating principle is proposed. This piezomotor consists of two stages that are integrated, and each one delivers continuous motion in one-axis. Each of the stages consists of three actuating parts: two clamping actuators to engage/disengage with the guideway or frame (depend on the stage), and one feeder actuator to provide the stepby-step motion. The mode shapes and Von Mises stress distribution for each stage are analyzed by using the finite element analysis method. The performance of each stage is then verified throughout the experimental tests. The experimental tests are carried out to realize the two-axis piezomotor characteristics such as step pitch, resolution, axial speed, bearing capacity, and operating frequency in each stage.

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Section: Clamp and Feeder Structural Designmentioning

confidence: 99%

A novel high performance integrated two-axis inchworm piezoelectric motor

Tahmasebipour

Sangchap

2019

Smart Mater. Struct.

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“…Electrical discharge machining (EDM) process has the ability to fabricate high-precision products for communication, aerospace, and automotive industries [1][2][3][4][5][6]. It is a thermal machining process where the machined area of the workpiece is removed by the thermal energy created by the electrical spark [4,7,8]. The electrical sparking process is a repetitive and discrete process which is carried out in dielectric fluid [4,[7][8][9].…”

Section: Introductionmentioning

confidence: 99%

“…It is a thermal machining process where the machined area of the workpiece is removed by the thermal energy created by the electrical spark [4,7,8]. The electrical sparking process is a repetitive and discrete process which is carried out in dielectric fluid [4,[7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Stability of micro dry wire EDM: OFAT and DOE method

Banu

Ali

Rahman

et al. 2020

Int J Adv Manuf Technol

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Micro dry wire electrical discharge machining (μDWEDM) is an environmental-friendly machining process where gas is used as the dielectric fluid instead of liquid. In this process, certain modifications of wire electrical discharge machining (WEDM) are required during the machining operation for stable machining. In μDWEDM, the process is considered stable if the machining is continuous without any interruption due to wire breakage or wire lag. However, in the present state of the arts, stable and smooth machining process using μDWEDM remains a critical issue. Hence, the objectives of this research are to establish a stable μDWEDM process using two different experimental approaches: one-factor-at-a-time (OFAT) and design of experiment (DOE) method. The investigation was performed on a stainless steel (SS304) with a tungsten wire as the electrode using integrated multiprocess machine tool, DT 110 (Mikrotools Inc., Singapore). Types of dielectric fluid, dielectric fluid pressure, polarity, threshold voltage, wire tension, wire feed rate, wire speed, gap voltage, and capacitance were the controlled parameters. The machining length of the microchannels was measured using scanning electron microscope (SEM) (JEOL JSM-5600, Japan). Analysis based on these two experimental approaches shows that stable μDWEDM process is achievable when the types of dielectric fluid, dielectric fluid pressure, polarity, threshold voltage, wire tension, wire feed rate, and wire speed remain as the fixed parameters while the capacitance and gap voltage remain as the controlled parameters.

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“…In present research, a steel MEMS capacitive accelerometer was designed and fabricated using conventional MEMS microfabrication methods, as well as the µWEDM process, with the latter allowing for achieving a larger proof mass. The EDM process can be used for micro-fabrication [29,30] and nano-fabrication [31][32][33][34][35]. In addition, high density of steel made it possible to obtain a heavier proof mass in the same volume in comparison with silicon accelerometers.…”

Section: Introductionmentioning

confidence: 99%

A novel capacitive micro-accelerometer made of steel using micro wire electrical discharge machining method

Vafaie

Tahmasebipour

2019

J. Micromech. Microeng.

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A new method has been proposed to design and fabricate a metallic microelectromechanical capacitive accelerometer, in this paper. The conventional MEMS fabrication methods, as well as the micro wire electrical discharge machining (µWEDM) method, have been employed to fabricate the proposed accelerometer. The µWEDM offers several advantages including its capability for attaining a proof mass of higher thickness, as well as using dense metals, in the accelerometers, thus providing better control over noise reduction and damping. This sensor has the proof mass of 6.8 mg which leads to the low Brownian noise of 1.2 µg/ √ Hz. The proof mass-beam structure of the accelerometer has been made of steel, which has higher yield strength and fracture toughness than silicon, enabling the accelerometer to withstand high-amplitude accelerations. Conducted tests showed that this sensor operates in the range of 100 g. Thanks to its low noise (due to the larger proof mass) and capability to measure high-amplitude accelerations (due to the high yield strength of steel), the dynamic range of the proposed accelerometer is improved considerably in comparison with the conventional MEMS accelerometers. The presented accelerometer is also operable in the air which facilitates its packaging

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Electro-Spark Nanomachining Process Simulation

Cited by 5 publications

References 10 publications

A novel high performance integrated two-axis inchworm piezoelectric motor

A novel high performance integrated two-axis inchworm piezoelectric motor

Stability of micro dry wire EDM: OFAT and DOE method

A novel capacitive micro-accelerometer made of steel using micro wire electrical discharge machining method

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