A novel high performance integrated two-axis inchworm piezoelectric motor

Abstract

In all of the actuating mechanisms for the precision positioning systems such as compliant, inertial, ultrasonic and inchworm, the lack of an integrated precision positioning system with high stroke and multi-axis operation is felt. In this paper, a state-of-the-art integrated two-axis inchworm piezomotor with an innovative operating principle is proposed. This piezomotor consists of two stages that are integrated, and each one delivers continuous motion in one-axis. Each of the stages consists of three actuating parts: two clamping actuators to engage/disengage with the guideway or frame (depend on the stage), and one feeder actuator to provide the stepby-step motion. The mode shapes and Von Mises stress distribution for each stage are analyzed by using the finite element analysis method. The performance of each stage is then verified throughout the experimental tests. The experimental tests are carried out to realize the two-axis piezomotor characteristics such as step pitch, resolution, axial speed, bearing capacity, and operating frequency in each stage.

Bionic Stepping Motors Driven by Piezoelectric Materials

“…Moreover, the contact and separation of the clamping module cause vibrations and motion errors in the rotor. Therefore, the inchworm motors composed of one feeding module and two clamping modules show large load capacity, whereas they have oversized structure, large oscillation, slow velocity, and complicated control system [61][62][63][64][65][66][67][68][69][70][71][72]. In contrast, the inertia motors, which are composed of one feeding module, one locking component, and one inertia mass, have compact structure, small oscillation, fast velocity, and a simple control system, while the load capacity is small [73][74][75][76][77][78][79][80][81][82].…”

“…For the walker motor, all the functional modules are installed on the rotor. Namely, the walker motor possesses a stator with simple structures and a rotor with complex structures [61][62][63][64][65][66][67][68][69][70][71][72]. For the pusher motor, all the functional modules are installed on the stator.…”

Digital Demodulation Using I/Q Signals and Optical Phase Control Applied to a Vibrometer

“…MAFPAs consist of multi-flexible structures actuated by two or more piezoceramics, and thus, can provide more than one degree of freedom. This solution allows, for example, the development of nanopositioner XY stages [28], tilt-positioning mechanisms [29], piezoelectric grippers [30] and piezoelectric motors [31]. The MAFPA devices used in this paper were designed (using the topology optimization method) and manufactured utilizing two PZT piezoceramics, and therefore actuators with two degrees of freedom were obtained.…”

“…At present, the main kind of commercially available devices for piezoelectric motor applications are of the following types: a) flexible hinge-based nanopositioner, where the solid links are generally rigid and the flexure hinges are compliant in bending about one axis but rigid about the cross axis [32]; b) inchworm motor, where the motor imitates the motion mode of an inchworm crawling, viz. the amount of continuous nanoscale movement occurs through a series of cyclic deformation motions, generally formed by three piezoelectric actuators [31,33]; and c) ultrasonic motor [34,35], where the stator formed in piezoelectric structures generates an ultrasonic vibration at frequencies of several kHz, and the friction motion can change this ultrasonic vibration into a rectilinear motion of the slider. All of these structures were composed of several piezoceramics or piezoelectric actuators embedded in a flexible metal structure.…”

A Novel Low-Frequency Piezoelectric Motor Modulated by an Electromagnetic Field

“…The inchworm piezoelectric motor is a precision driving device that imitates the movement state of the inchworm and uses piezoelectric actuators. Mohammad T. et al [9], proposed a two-axis inchworm piezoelectric motor, which consists of two integrated stages. Each stage provides continuous motion on one axis.…”