2000
DOI: 10.1063/1.126046
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Electro-optic modulation in crystal-ion-sliced z-cut LiNbO3 thin films

Abstract: Electro-optic modulation is demonstrated in 10-μm-thick single-crystal LiNbO3 films obtained by crystal ion slicing. This technique uses ion implantation of single-crystal bulk samples followed by selective etching. The measured electro-optic response of these films is comparable, within experimental error, to that of single-crystal bulk LiNbO3 and is superior to previously reported values for epitaxial polycrystalline thin films. The product of half-wave voltage and modulator length, VπL, is 8 V cm. Post lift… Show more

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Cited by 79 publications
(20 citation statements)
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“…They were not flat but curved in the long direction with the implanted side on the inside of the curvature to stress caused by the crystal damage in the implanted layer [6]. The curvature can be removed by thermal annealing at over 800 0 C [7]. Fig.…”
Section: Fabrication Of Single Crystal Linbo 3 Micro-plateletsmentioning
confidence: 97%
“…They were not flat but curved in the long direction with the implanted side on the inside of the curvature to stress caused by the crystal damage in the implanted layer [6]. The curvature can be removed by thermal annealing at over 800 0 C [7]. Fig.…”
Section: Fabrication Of Single Crystal Linbo 3 Micro-plateletsmentioning
confidence: 97%
“…The film was sandwiched between two metal electrodes; no buffer oxide layer was employed in this experiment. The measured V π L product required for optical switching at 1550 nm was~8 Vcm, 29 while a theoretical value of V π L = λ⋅d /n e 3 ⋅r 33 -n o 3 ⋅r 13  ≈ 7.4 V⋅cm is obtained for an ideal thin-film intensity modulator with bulk properties. Given that the measured CIS film birefringence closely approximates bulk values, the electro-optical coefficients of the thin CIS material are essentially those of the singlecrystal bulk.…”
Section: Low-voltage Cis-based Electro-optic Modulatorsmentioning
confidence: 99%
“…30 χ (2) -related optical properties of the CIS LiNbO 3 material have been measured, and found to be equal to, or closely approximate to the bulk values. 20,29 Electro-optical coefficients (r 33 , r 13 ) were determined using an intensity modulator configuration (input light at 45°relative to the TE/TM polarization). The film was sandwiched between two metal electrodes; no buffer oxide layer was employed in this experiment.…”
Section: Low-voltage Cis-based Electro-optic Modulatorsmentioning
confidence: 99%
“…In association with nano-structures such has photonic crystals, membrane or nano-waveguide, it has been proven that LN is an ideal candidate for electro-or acousto-optic modulation [6,7], lasers [8], or thermo-optic sensors [9]. However, these devices require patterning, etching or milling of the LN substrate.…”
Section: Introductionmentioning
confidence: 99%