Electro-mechanical properties of multilayered aluminum nitride and platinum thin films at high temperatures

Schmid, P.; Triendl, F.; Zarfl, C.; Schwarz, Sabine; Artner, Werner; Schneider, Michael; Schmid, U.

doi:10.1016/j.sna.2019.04.036

Cited by 14 publications

(4 citation statements)

References 15 publications

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“…Some studies have revealed that GF of high‐temperature TFSG attenuates to different degrees at high temperature. [ 45,84 ] Interestingly, the sensitivity of SiCN TFSG increased significantly at high temperature (GF = 3 at 30 °C and GF = 20 at 800 °C). The increased sensitivity may be related to thermal‐assisted hopping/tunneling electron transport in the tunneling‐percolation region (i.e., middle and near‐surface region of film).…”

Section: Resultsmentioning

confidence: 99%

Abnormal Graphitization Behavior in Near‐Surface/Interface Region of Polymer‐Derived Ceramics

Lin

Pan

et al. 2022

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A free carbon phase has been proven to be beneficial for many structural and functional properties of PDCs, such as electrical conductivity, [8][9][10][11][12][13][14] electromagnetic properties, [15][16][17] electrochemical properties, [18,19] piezoelectricity, [20,21] corrosion resistance, [22] and oxidation resistance. [23] In high-temperature sensing applications, the concentration and morphology of free carbon strongly affect the electrical properties of devices and the selectivity/sensitivity of sensors. [4] In energy applications, PDCs are considered promising for electrical energy storage in devices ranging from cell phones to electric cars. [24] The electrical conductivity or free carbon morphology of PDC-based anode materials for lithium ion batteries plays an important role in achieving high reversible capacity, good rate performance, and reliable cycle stability. [25] In electromagnetic wave absorbing and shielding applications, an increase in the free carbon concentration of PDCs leads to an increase in the dielectric loss and, in turn, improves the total shielding effectiveness in terms of both absorption and reflection shielding effectiveness. [26] Therefore, the microstructural evolution of carbon and the properties resulting from the same are of great interest in this research area.This leads to the fundamental and common question of how to effectively regulate the structural evolution of carbon to further enhance the performance of PDCs. The polymer-toceramic transformation process of most PDCs mainly includes the synthesis of a preceramic precursor, shaping, cross-linking, and pyrolysis. [2,27] Amorphous PDCs undergo a devitrification process to form an amorphous multiphase system through a redistribution reaction of chemical bonds under hightemperature conditions. [2,27] The separated free carbon phase undergoes a graphitization process that plays an important role in the microstructural evolution of PDCs. [4] Many studies have claimed that the amount of free carbon within PDCs strongly depends on the thermal stability of the hydrocarbon linkages rather than on the percentage of the total carbon content of the polymer; therefore, a large number of new precursor solutions (e.g., polysiloxane or polysilazane, carbon-rich or carbonpoor polymers) and optimized heat-treatment parameters (e.g., temperature, atmosphere, and holding time) have been designed and explored to improve the graphitization level of The in situ free carbon generated in polymer-derived ceramics (PDCs) plays a crucial role in their unique microstructure and resultant properties. This study advances a new phenomenon of graphitization of PDCs. Specifically, whether in micro-/nanoscale films or millimeter-scale bulks, the surface/interface radically changes the fate of carbon and the evolution of PDC nanodomains, promotes the graphitization of carbon, and evolves a free carbon enriched layer in the near-surface/interface region. Affected by the enrichment behavior of free carbon in the near-surface/interface region, PDCs exhibit h...

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Section: Resultsmentioning

confidence: 99%

Abnormal Graphitization Behavior in Near‐Surface/Interface Region of Polymer‐Derived Ceramics

Lin

Pan

et al. 2022

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“…Several approaches have been proposed for the mitigation of delamination and recrystallization of noble metal thin films at high temperatures: (1) the deposition of bilayer structures with an adhesion layer (Ti, Ta, Cr, Zr) between the substrate and the conductive layer [17][18][19][20][21][22][23][24] or the use of an oxidizing atmosphere during the initial stage of the noble metal sputtering [25,26], (2) the sputtering of a protective dielectric layer (Si, Al 2 O 3 , Si 3 N 4 , TiO 2 , SiAlON, SiO 2 + Si 3 N 4 ) onto the top surface of metal layer [16,24,[27][28][29][30], (3) alloying platinum with metals that have higher melting point (Ir, Rh) [24,[31][32][33][34], and (4) the incorporation of refractory oxides (ZrO 2 , HfO 2 , Nb 2 O 3 , Y 2 O 3 , RuO 2 ), acting as anchors to stabilize the grain boundaries of the metal phase [24,33,[35][36][37][38]. All these approaches require recrystallization annealing at temperatures exceeding the operating temperature range of thin-film devices [17,39].…”

Section: Introductionmentioning

confidence: 99%

Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films

Pleshakov,

Kalinin,

Ivanov

et al. 2023

Micromachines

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Platinum-based thin films are widely used to create microelectronic devices operating at temperatures above 500 °C. One of the most effective ways to increase the high-temperature stability of platinum-based films involves incorporating refractory metal oxides (e.g., ZrO2, HfO2). In such structures, refractory oxide is located along the metal grain boundaries and hinders the mobility of Pt atoms. However, the effect of annealing conditions on the morphology and functional properties of such multiphase systems is rarely studied. Here, we show that the two-step annealing of 250-nm-thick Pt-Rh/Zr multilayer films instead of the widely used isothermal annealing leads to a more uniform film morphology without voids and hillocks. The composition and morphology of as-deposited and annealed films were investigated using X-ray diffraction and scanning electron microscopy, combined with energy-dispersive X-ray spectroscopy. At the first annealing step at 450 °C, zirconium oxidation was observed. The second high-temperature annealing at 800–1000 °C resulted in the recrystallization of the Pt-Rh alloy. In comparison to the one-step annealing of Pt-Rh and Pt-Rh/Zr films, after two-step annealing, the metal phase in the Pt-Rh/Zr films has a smaller grain size and a less pronounced texture in the <111> direction, manifesting enhanced high-temperature stability. After two-step annealing at 450/900 °C, the Pt-Rh/Zr thin film possessed a grain size of 60 ± 27 nm and a resistivity of 17 × 10−6 Ω·m. The proposed annealing protocol can be used to create thin-film MEMS devices for operation at elevated temperatures, e.g., microheater-based gas sensors.

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“…Ni80Cr20 and TiAlN are used at temperatures below 600 °C. Pt [ 12 , 13 ] is used in the high-temperature environment of 500 °C–900 °C and is easy to oxidize and dissolve but is unsuitable for long-term use at high temperatures. ITO [ 14 , 15 , 16 ] has high stability and excellent resistivity, but its own electrical and chemical properties fluctuate considerably at temperatures below 950 °C with resistance drift, which affects the accuracy of the strain output results.…”

Section: Introductionmentioning

confidence: 99%

Development of High-Temperature Wire-Grid Thin Film Strain Gauges

Cui

Zhang³

et al. 2022

Sensors

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Aero-engine turbine stator blades are often used in harsh environments with high temperatures and high pressure and are prone to fatigue fractures. Real-time and accurate monitoring of blade surface stress and strain is critical to ensure safe operation. In this study, thin-film strain gauges (TFSGs) that can be used in high-temperature environments above 1000 °C were designed and fabricated using a PtRh6 thin film as the sensitive material. The hysteresis effect of the stress transfer upon establishing a thermo-mechanical coupling finite element model of the Inconel718 high-temperature nickel-based alloy equal-strength beam PtRh6 TFSGs was analyzed and the optimal combination of thin-film thickness and longitudinal grid length of wire-grid TFSGs was determined. In order to solve the problem of high-temperature insulation, the insulating properties of a single-layer Al2O3 insulating film, a single-layer ZrO2 insulating film, a double-layer Al2O3/ZrO2 composite insulating film, and a four-layer Al2O3/ZrO2/Al2O3/ZrO2 composite insulating film at high temperature were compared and studied using scanning electron microscopy to analyze the microscopic morphology and composition of the four insulating film structures. The results showed that the four-layer Al2O3/ZrO2/Al2O3/ZrO2 composite insulating film had the best insulating properties at high temperatures. On this basis, an Al2O3/ZrO2/Al2O3/ZrO2 composite insulating film, PtRh6 sensitive layer, and Al2O3 protective film were sequentially deposited on a high-temperature nickel-based alloy equal-strength beam using DC pulsed magnetron sputtering technology to obtain an Inconel718 high-temperature nickel-based alloy equal-strength beam PtRh6 TFSG. Its gauge factor (GF) and temperature coefficient of resistance (TCR) were calibrated, and the results showed that the sensor could be used in harsh environments of 1000 °C. The above results provide new ideas for measuring stress and strain in aerospace under high-temperature and high-pressure environments.

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Electro-mechanical properties of multilayered aluminum nitride and platinum thin films at high temperatures

Cited by 14 publications

References 15 publications

Abnormal Graphitization Behavior in Near‐Surface/Interface Region of Polymer‐Derived Ceramics

Abnormal Graphitization Behavior in Near‐Surface/Interface Region of Polymer‐Derived Ceramics

Towards High-Temperature MEMS: Two-Step Annealing Suppressed Recrystallization in Thin Multilayer Pt-Rh/Zr Films

Development of High-Temperature Wire-Grid Thin Film Strain Gauges

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