Electrically conducting ultrananocrystalline diamond for the development of a next generation of micro-actuators

Buja, Federico; Sumant, Anirudha V.; Kokorian, Jaap; Spengen, W. Merlijn van

doi:10.1016/j.sna.2014.04.042

Cited by 18 publications

(11 citation statements)

References 30 publications

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“…However, broad adoption of diamond-based devices has so far been hindered by a lack of large area conductive diamond membranes and efficient nanoscale p-n junctions. While progress has been made to demonstrate proof of concept experiments and develop nanofabrication protocols to sculpt diamond 4,[14][15][16][17][18][19][20][21][22] , large-scale conductive diamond membranes that are suitable for efficient p-n or p-i-n junction engineering are currently beyond reach. This is due, in part, by the challenges associated with epitaxial growth onto non-diamond sacrificial substrates that can be subsequently chemically removeda process that is well established for silicon and gallium arsenide.…”

Section: Introductionmentioning

confidence: 99%

Single crystal diamond membranes for nanoelectronics

Bray

Kato²,

Previdi

et al. 2018

Nanoscale

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Single crystal, nanoscale diamond membranes are highly sought after for a variety of applications including nanophotonics, nanoelectronics and quantum information science. However, so far, the availability of conductive diamond membranes has remained an unreachable goal. In this work we present a complete nanofabrication methodology for engineering high aspect ratio, electrically active single crystal diamond membranes. The membranes have large lateral directions, exceeding ∼500 × 500 μm and are only several hundreds of nanometers thick. We further realize vertical single crystal p-n junctions made from the diamond membranes that exhibit onset voltages of ∼10 V and a current of several mA. Moreover, we deterministically introduce optically active color centers into the membranes, and demonstrate for the first time a single crystal nanoscale diamond LED. The robust and scalable approach to engineer the electrically active single crystal diamond membranes offers new pathways for advanced nanophotonic, nanoelectronic and optomechanical devices employing diamond.

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Section: Introductionmentioning

confidence: 99%

Single crystal diamond membranes for nanoelectronics

Bray

Kato²,

Previdi

et al. 2018

Nanoscale

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“…To demonstrate the merits of the curve-fitting technique, we will show several measurements using three different MEMS actuators: the nano-ram adhesion sensor comb drive [21] shown in figure 1a that we used earlier in this paper to explain the technique, a 'Leiden MEMS tribometer' [23] and a novel nitrogen-incorporated ultrananocrystalline diamond (N-UNCD) based adhesion sensor [24]. The intensity profiles of their beam springs look slightly different, but the devices are similar in design.…”

Section: Methodsmentioning

confidence: 99%

In-Plane Displacement Detection With Picometer Accuracy on a Conventional Microscope

Kokorian

Buja

Spengen

2015

J. Microelectromech. Syst.

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Abstract-In this paper, we present a new method for detecting in-plane displacements in microelectromechanical systems (MEMS) with an unprecedented sub-ångström accuracy. We use a curve-fitting method that is commonly employed in spectroscopy to find peak positions in a spectrum. We fit a function to the intensity profile of the image of a silicon beam that was captured with a CCD camera on an optical microscope. The position resolution depends on the amount of pixel noise and on how the moving feature is spread across the detector pixels. The resolution is usually limited by photon shot noise, which can be controlled and lowered in several ways. To demonstrate the technique we measure the adhesion snap-off of two silicon surfaces. We assess the accuracy of the technique using two different silicon MEMS devices and an experimental ultrananocrystalline diamond device. The lowest position noise that we report is obtained by summing 1 577 image lines and is as low as 60 pm root mean square.[ 2014-0040]Index Terms-Displacement measurement, optical noise, optical image processing, optical position measurement, MEMS, subpixel resolution.

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“…1). The detailed description of a conductive UNCD MEMS actuator like this, is given elsewhere [23]. The fabrication of the micro-device was carried out in a class 100 cleanroom, with standard lithographic processes and conventional hard mask deposition techniques (Fig.…”

Section: Fabricationmentioning

confidence: 99%

Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Buja

Kokorian

Sumant

et al. 2015

Diamond and Related Materials

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a b s t r a c tIn this study, we have investigated the adhesion phenomena between two sidewalls in boron-doped ultrananocrystalline diamond (B-UNCD) micro-electro mechanical systems (MEMS) in a humid and dry environment. We have developed and built B-UNCD MEMS test devices, in order to assess the tribological properties of diamond micro devices in-situ. Using these devices, we have been able to measure the adhesion force with approximately 15 nN resolution, by monitoring the displacement optically with a precision of 4 nm. In the case of testing in a dry atmosphere, virtually no adhesion (b 18 nN) was observed between the sidewalls. After testing in humid air over 55,000 cycles, increased adhesion force up to 128 nN was measured. A rare observation of capillary neck formation between sidewalls at high contact force, in humid air is observed which is most probably caused by the precipitation of carbon contamination. This contamination layer can be easily removed by oxygen plasma exposure but thereafter highest adhesion force of 260 nN adhesive force was measured. Our studies demonstrate that micromechanical devices fabricated based on diamond represent a great alternative over polysilicon based devices in terms of reduced adhesion and thus long term reliability, which is a significant step forward in developing diamond based MEMS.

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Electrically conducting ultrananocrystalline diamond for the development of a next generation of micro-actuators

Cited by 18 publications

References 30 publications

Single crystal diamond membranes for nanoelectronics

Single crystal diamond membranes for nanoelectronics

In-Plane Displacement Detection With Picometer Accuracy on a Conventional Microscope

Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

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