“…For the contact with excess Cu (10 at.% Ge), q c is slightly higher than for the fully reacted case, and if a greater effective interfacial area consists of Cu/GaN than f/GaN, q c would be greater than for the case of less Cu/GaN contact area, because Cu forms Schottky contact to n-GaN. 21 In previous work, 11 examination of the 30 at.% Ge film by Auger depth profiling showed 3:1 mixing of Cu to Ge after annealing, as well as interfacial diffusion of Cu, Ge, Ga, and N. Figure 6a shows that near the contact film/semiconductor interface, the concentration ratio of Cu to Ge drops below 3, suggesting that the cubic Ge detected by XRD for this film resides at this interface, and the remainder of 26 Fig. 6b suggests significant Ga diffusion into the contact film, which may form interfacial gallium vacancies V Ga , an energetically favorable defect in n-GaN.…”