2019
DOI: 10.1109/tcpmt.2019.2935477
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Electrical, Thermal, and Mechanical Characterization of eWLB, Fully Molded Fan-Out Package, and Fan-Out Chip Last Package

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Cited by 24 publications
(5 citation statements)
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“…To examine the thermal, mechanical and electrical response of the three Fan-out (FO) packaging technologies shown in Fig. 13, a 3D numerical model is proposed in [82]. The study confirmed that FOCLP has the highest warpage due to the CTE mismatch between the molding materials and the thin substrate.…”
Section: ) Modeling Of Wafer-level Packagingmentioning
confidence: 89%
“…To examine the thermal, mechanical and electrical response of the three Fan-out (FO) packaging technologies shown in Fig. 13, a 3D numerical model is proposed in [82]. The study confirmed that FOCLP has the highest warpage due to the CTE mismatch between the molding materials and the thin substrate.…”
Section: ) Modeling Of Wafer-level Packagingmentioning
confidence: 89%
“…In this study, in addition to using the aforementioned EMC, the material properties of EMC were further modified to observe their effects on wafer warpage. Based on a literature review of EMC material parameters [1][2][3][4][5][6]8,15,16], the upper and lower limits of adjustable material values were summarized and organized as shown in Table 4. The range of modulation of Young's modulus was defined in the study as the temperature interval before and after the Tg point of the EMC, named the temperature interval E L (from 25 • C to 35 • C) and E H (from 235 • C to 260 • C), respectively, with ∆T as the temperature interval between E L and E H (as shown in Figure 7).…”
Section: Establishing Materials Parametersmentioning
confidence: 99%
“…The FOWLP fabrication process is made up of three basic flows. [14][15][16] Figure 2 shows a simplified image of the manufacturing process flows: The electrical connections between the die and package are implemented by direct RDL formation on the die pad in a die-first (facedown) process; [17,18] RDL formation is performed after CMP using a die-first (face-up) process; [19,20] and flip chip mounting to RDL is performed using solder bumps on the chip in an RDL-first process. [21,22] In this study, a die-first (face-down) process is selected as the manufacturing process because the corresponding mass production technology has already been established.…”
Section: Issues and Solutions For Fowlpmentioning
confidence: 99%