2001
DOI: 10.1016/s0925-9635(00)00492-1
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Electrical properties of thick boron and nitrogen contained CVD diamond films

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Cited by 39 publications
(22 citation statements)
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“…In Q-DLTS, the maximum depth of the detectable trap volume is the width of the depletion layer [19]. From the standard calculation of the depletion layer at the applied bias, we can estimate that the E 11 trap arises from depths up to 60 nm.…”
Section: Discussionmentioning
confidence: 99%
“…In Q-DLTS, the maximum depth of the detectable trap volume is the width of the depletion layer [19]. From the standard calculation of the depletion layer at the applied bias, we can estimate that the E 11 trap arises from depths up to 60 nm.…”
Section: Discussionmentioning
confidence: 99%
“…The activation energy ( E a ) and the capture cross section ( σ s ) can be deduced from the Arrhenius dependence of ln( τ italicm−1 × T −2 ) on T after measuring the Q‐DLTS spectra at different temperatures. More detailed introduction of the principle of Q‐DLTS has been described by Polyakov 11.…”
Section: Methodsmentioning
confidence: 99%
“…As important and powerful nondestructive characterization techniques, Raman spectroscopy and X-ray diffraction (XRD) have been extensively proposed to analyze crystalline structure, boron concentration, and residual stress in B-doped diamond films [6,8,9]. In previous work, thick (with thicknesses of more than ten or ten's microns) B-doped diamond films (including CVD freestanding polycrystalline films and single crystals) have been widely studied [3,4,[10][11][12][13][14] and applied in a variety of fields, such as electrochemistry electrodes, superconductors, and diamond-based optoelectronic devices. Since the growth process of thick (freestanding) B-doped films generally takes a long time (10 h or hours in tens), the corresponding B-doping and crystalline structure in the films would be strongly dependent on varying reaction ambient and growth features.…”
Section: Introductionmentioning
confidence: 99%