Electrical Properties of Carbon Nanotube Bundles for Future Via Interconnects

Abstract

We have developed carbon nanotube (CNT) vias consisting of about 1000 tubes using thermal chemical vapor deposition (CVD) at a growth temperature of 450°C with cobalt catalysts, titanium carbide ohmic contacts, and tantalum barrier layers on copper wiring. The lowest resistance obtained was about 5 Ω/via. The total resistance of the CNT via was three orders of magnitude lower than that of one CNT, indicating that the current flows in parallel through about 1000 tubes. No degradation was observed for 100 hours at via current densities of 2×106 A/cm2, which is favorably compared with Cu vias.

Correlating electrical resistance to growth conditions for multiwalled carbon nanotubes

“…7 Although electrical transport in CNTs has been studied extensively, [8][9][10] a systematic electrical characterization of individual CNTs grown at different temperatures has not yet been reported. Typically, electrical characterization involves bundles of CNTs, [11][12][13] providing little information about the properties of individual CNTs. In what follows, we present resistance measurements of individual MWNTs randomly selected from MWNTs grown at 800, 900, and 950°C.…”

Carbon nanotube formation using zeolite template and applications

“…Due to their unique physical and chemical properties [15], they promise a variety of potential technological applications across many fields such as nanoelectronic devices [16] and interconnects [17],…”

Layer-by-layer functionalized nanotube arrays: A versatile microfluidic platform for biodetection

“…One such textured element that has received considerable attention is an aligned array of nanofibers, such as carbon nanotubes (CNTs) [19][20][21] . CNTs are attractive because of their intrinsic mechanical, electrical, magnetic, and optical properties [22][23][24][25][26][27][28][29] as well as the multiple routes to synthesize and give texture to bulk assemblies of the nanofibers. Biomedical applications are particularly well suited, owing to the wealth of existing surface chemistries available for functionalization (e.g., antibody binding).…”