Electrical Properties and Microstructures of Ultraviolet Transparent Ga&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt; Thin Films

Shigetoshi, Yasuhiro; Tsukimoto, Susumu; Takeda, Hidehisa; Ito, Kazuhiro; Murakami, Masanori

doi:10.4028/0-87849-462-6.1233

Materials Science Forum

2007

DOI: 10.4028/0-87849-462-6.1233

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Electrical Properties and Microstructures of Ultraviolet Transparent Ga<sub>2</sub>O<sub>3</sub> Thin Films

Yasuhiro Shigetoshi¹,

Susumu Tsukimoto²,

Hidehisa Takeda³

et al.

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Electrical Properties and Microstructures of Ultraviolet Transparent Ga<sub>2</sub>O<sub>3</sub> Thin Films

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