Electrical parameters and the plasma composition in HCl-H2 mixtures

Kinetics of heterogeneous decay of chlorine and hydrogen atoms in plasmas of HCl binary mixtures with Ar, H2, O2, and Cl2

“…The modeling of the kinetics of neutral species in the plasmas of HCl mixtures with Ar, H 2 , O 2 , and Cl 2 using the kinetic schemes (sets of reactions, cross sec tions, and rate constants) reported in [5][6][7][8] showed that the assumption γ Cl , γ H = const does not ensure agreement between the patterns of the n H, Cl = f(y) and = f(y) curves (Fig. 2).…”

“…The kinetic schemes (sets of reactions, cross sec tions, and rate constants) used in the calculations were borrowed from [5][6][7][8]. The validity of the models was supported by satisfactory agreement between the experimental and calculated values of E/N.…”

“…In previous studies [5][6][7][8] devoted to the simulation of plasmas of binary mixtures of HCl with Ar, H 2 , O 2 , and Cl 2 , it was shown that varying the initial composition of the mixture at constant external discharge parameters affects the kinetics of plasma chemical processes by changing the electron energy distribution in plasma and the mean energy and num ber density of the electrons. The main drawback of the aforementioned studies was a weak experimental basis, which could not allow an unambiguous conclu sion about the reliability of the data on the plasma composition.…”