Electrical discharge machining of semiconductor materials: A review

Zhu, X.F.; Li, Guangxian; Mo, John P.T.; Ding, Songlin

doi:10.1016/j.jmrt.2023.06.202

Cited by 7 publications

(4 citation statements)

References 161 publications

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“…The material removal mechanism can significantly differ from the standard electroerosion process depending on the electrical resistivity and melting temperature of the material [28]. For instance, materials with high electrical resistance tend to generate additional heat, promoting melting, evaporation, and thermal exfoliation.…”

Section: Edm Process Physicsmentioning

confidence: 99%

“…EDM has become widely utilized for processing materials like titanium [4,36,117], steel [50,104,118], and various alloys [80,119,120]. Recently, EDM has also been increasingly applied to non-traditional materials, including composites [42,77,121], ceramics [29,30,107], and semiconductors [28,122]. Electrode materials must resist erosion, offer workability, and ensure stable machining.…”

Section: Experimental Datamentioning

confidence: 99%

See 1 more Smart Citation

Recent Trends and Developments in the Electrical Discharge Machining Industry: A Review

Kamenskikh,

Muratov,

Shlykov

et al. 2023

JMMP

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Electrical discharge machining (EDM) is a highly precise technology that not only facilitates the machining of components into desired shapes but also enables the alteration of the physical and chemical properties of workpieces. The complexity of the process is due to a number of regulating factors such as the material of the workpiece and tools, dielectric medium, and other process parameters. Based on the material type, electrode shape, and process configuration, various shapes and degrees of accuracy can be generated. The study of erosion is based on research into processing techniques, which are the primary tools for using EDM. Empirical knowledge with subsequent optimization of technological parameters is one of the ways to obtain the required surface quality of the workpiece with defect minimization, as well as mathematical and numerical modeling of the EDM process. This article critically examines all key aspects of EDM, reflecting both the early foundations of electrical erosion and the current state of the industry, noting the current trends towards the transition of EDM to the 5.0 industry zone in terms of safety and minimizing the impact of the process on the environment.

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Section: Edm Process Physicsmentioning

confidence: 99%

Section: Experimental Datamentioning

confidence: 99%

Recent Trends and Developments in the Electrical Discharge Machining Industry: A Review

Kamenskikh,

Muratov,

Shlykov

et al. 2023

JMMP

View full text Add to dashboard Cite

show abstract

“…Physical plasma-hereafter referred to simply as plasma in this review, as opposed to blood plasma-is thought to have been first produced purposefully in the laboratory in 1879 by Sir William Crookes; however, the term "plasma" was not introduced until 1928 by chemist Irving Langmuir [2]. Since these early investigations, plasma research has developed into a complex and multifaceted area of study with well-established applications in semiconductor manufacturing [3,4], clean energy [5,6], lighting [7], space propulsion [8], and many others. The focus of this review is the biomedical applications of cold atmospheric plasmas (CAPs) and the current obstacles in the emerging field of plasma medicine (a literature search was conducted with a focus on publications between 2017 and 2023, with more emphasis on the later years).…”

Section: Introductionmentioning

confidence: 99%

Cold Atmospheric Plasma Medicine: Applications, Challenges, and Opportunities for Predictive Control

Kazemi,

Nicol,

Bilén

et al. 2024

Plasma

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Plasma medicine is an emerging field that applies the science and engineering of physical plasma to biomedical applications. Low-temperature plasma, also known as cold plasma, is generated via the ionization of atoms in a gas, generally via exposure to strong electric fields, and consists of ions, free radicals, and molecules at varying energy states. Plasmas generated at low temperatures (approximately room temperature) have been used for applications in dermatology, oncology, and anti-microbial strategies. Despite current and ongoing clinical use, the exact mechanisms of action and the full range of effects of cold plasma treatment on cells are only just beginning to be understood. Direct and indirect effects of plasma on immune cells have the potential to be utilized for various applications such as immunomodulation, anti-infective therapies, and regulating inflammation. In this review, we combine diverse expertise in the fields of plasma chemistry, device design, and immunobiology to cover the history and current state of plasma medicine, basic plasma chemistry and their implications, the effects of cold atmospheric plasma on host cells with their potential immunological consequences, future directions, and the outlook and recommendations for plasma medicine.

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“…One of the non-conventional machining techniques is electro-discharge machining (EDM); it can be used to machine metals that are impractical and difficult to machine using conventional Techniques [1]. In the EDM process, material removal occurs due to the spark discharge in the machining gap between the machined surface and the used electrode [2]. A very high elevated temperature (8000 to 12000 ℃) generated in the machining gap due to the electrical discharge results in the melting and vaporizing of the machined material; material removal happens [3].…”

Section: Introductionmentioning

confidence: 99%

Investigation of white layer thickness, material removal rate, and tool wear rate of Inconel 718 by nano-Al2O3-mixed electrical discharge machining

Ghulam,

Ibrahim

2024

ETJ

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Electrical discharge machining of semiconductor materials: A review

Cited by 7 publications

References 161 publications

Recent Trends and Developments in the Electrical Discharge Machining Industry: A Review

Recent Trends and Developments in the Electrical Discharge Machining Industry: A Review

Cold Atmospheric Plasma Medicine: Applications, Challenges, and Opportunities for Predictive Control

Investigation of white layer thickness, material removal rate, and tool wear rate of Inconel 718 by nano-Al2O3-mixed electrical discharge machining

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