Electrical Defect Issues of Hetero-Epitaxy for Advanced Nanometric CMOS Technologies

Abstract

Epitaxial techniques have been around for several decades already, but are now becoming an essential process module for several state-of-the-art process technologies, whereby the stringent defect control requirements have imposed new challenges. Some state-of-the-art hetero-epitaxial applications are briefly reviewed from a defect engineering point of view.