Electrical characterization of metal/diamond-like carbon/inorganic semiconductor MIS Schottky barrier diodes

The effects of deposition potential on the optical, morphological and mechanical properties of DLC films produced by electrochemical deposition technique at low voltages

“…The second peak at 1400 cm −1 is the D peak which is characteristic of the extraordinary diamond formation. D and G bands are the characteristic peaks of DLC films [1,3].…”

“…2 regarding to optical transmittancewavelength graph, the optical transmittance of the films shows that the transparency of the films changes between 85 % and 89 % in the visible region. The forbidden energy gap E g of DLC films deposited at 2.4 V and 60 V potentials were calculated from equation 2, where the absorption coefficient of a direct (m = 1 2 ) band gap of DLC film is expressed as a function of E g…”

“…"Diamond-like carbon" (DLC) is a name given to semi-stable amorphous carbon (a:C) containing sp 2 and sp 3 bonds or amorphous carbon (a-C:H) containing hydrogen [1]. Importance of diamondlike carbon among engineering materials is increasing day by day for their potential in variety of industrial applications such as microelectronics, optical and mechanical transportation, and biomedical coatings due to their attractive mechanical and optical properties such as high resistance against abrasion and friction, high hardness, chemical * E-mail: aslan.naim@gmail.com inertness, infrared transmittance, wide band gap and high thermal conductivity [1][2][3][4][5][6]. The properties of DLC structures are related to the volumetric ratio of the sp 3 bonds that can be controlled by the coating mechanism [7].…”

“…Common synthesis methods for DLC films reported in the literature include: Radio Frequency (RF) Magnetron Sputtering Method [8], Chemical Vapor Deposition (CVD) [9], Physical Vapor Deposition (PVD) [10] and Ion-Beam [11]. Diamond-like carbon films have recently been reported to be prepared through the electrochemical deposition technique with organic solvents [1][2][3][12][13][14][15][16]. Electrochemical deposition technique has great advantages over the others.…”

Влияние Добавления Диборана На Свойства Плазмохимически Осаждаемых Углеродных Пленок

“…Так в работе [4] продемонстрировано увеличение эффективности кремниевых солнечных элементов после напыления просветляющей DLC-пленки. Показаны перспективы их ис-пользования и для высокочувствительных тонкопленочных резистивных термометров, работающих вблизи комнатной температуры [5], для создания оптически прозрачных инертных электродов в приложениях электрохимии [6,7], для создания датчиков давления на основе диодов Шоттки металл−DLC−полупроводник [8], в качестве антифрикционных и биологически инертных покрытий на имплантаты [9] и др. Учи-тывая весь комплекс свойств, можно уверенно предсказать успешное использование таких пленок и в будущем: в микро-и наноэлектро-нике, электрохимии, медицине и в биосенсорике.…”