2023
DOI: 10.1007/s00339-023-06639-5
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Frequency-dependent electrical parameters and extracted voltage-dependent surface states in Al/DLC/p-Si structure using the conductance method

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Cited by 12 publications
(1 citation statement)
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“…DLC films, which are also delineated as amorphous forms of carbon materials, take place in many applications such as magnetic storage disks, wearresistant films, biomedical coatings, and optical coatings (Basman et al, 2015;Zeng et al, 2014;Zhang et al, 2020). In a study in which DLC layer was electrochemically grown and used as an interlayer in Al/(DLC)/p-Si/Au MIS type structure, the electrical parameters of the structure were calculated, and it was concluded that the electrodeposited DLC interlayer can be used to reduce surface states or dislocations instead of the commonly used oxide/insulator interlayer (Şafak Asar et al, 2023). In another study, the electrical parameters of the MS structure using Ti doped DLC interlayer were investigated in the 1kHz-4kHz range by impedancespectroscopy method.…”
Section: Introductionmentioning
confidence: 99%
“…DLC films, which are also delineated as amorphous forms of carbon materials, take place in many applications such as magnetic storage disks, wearresistant films, biomedical coatings, and optical coatings (Basman et al, 2015;Zeng et al, 2014;Zhang et al, 2020). In a study in which DLC layer was electrochemically grown and used as an interlayer in Al/(DLC)/p-Si/Au MIS type structure, the electrical parameters of the structure were calculated, and it was concluded that the electrodeposited DLC interlayer can be used to reduce surface states or dislocations instead of the commonly used oxide/insulator interlayer (Şafak Asar et al, 2023). In another study, the electrical parameters of the MS structure using Ti doped DLC interlayer were investigated in the 1kHz-4kHz range by impedancespectroscopy method.…”
Section: Introductionmentioning
confidence: 99%