2016
DOI: 10.1016/j.mssp.2016.04.012
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Electrical characterization of defects introduced during electron beam deposition of W Schottky contacts on n-type 4H-SiC

Abstract: We have studied the defects introduced in n-type 4H-SiC during electron beam deposition (EBD) of tungsten by deep-level transient spectroscopy (DLTS). The results from currentvoltage and capacitance-voltage measurements showed deviations from ideality due to damage, but were still well suited to a DLTS study. We compared the electrical properties of six electrically active defects observed in EBD Schottky barrier diodes with those introduced in resistively evaporated material on the same material, as-grown, as… Show more

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Cited by 15 publications
(7 citation statements)
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“…In total, the EBE and EB-PVD had a significant impact on I-V and C-V characteristics of SBDs. A similar result was observed by Omotoso et.al in 4H-SiC [17,18]. However the quality was good enough for DLTS analysis.…”
Section: Resultssupporting
confidence: 87%
“…In total, the EBE and EB-PVD had a significant impact on I-V and C-V characteristics of SBDs. A similar result was observed by Omotoso et.al in 4H-SiC [17,18]. However the quality was good enough for DLTS analysis.…”
Section: Resultssupporting
confidence: 87%
“…The general increase in leakage current with temperature has been attributed to phonon assisted tunnelling of electrons from defect states close to the metal-semiconductor interface in n-GaN [33]. Several electron traps were reported in metal-4H-SiC SBDs fabricated by various techniques [34]. Ni devices had the least I R .…”
Section: Resultsmentioning
confidence: 99%
“…since the second part of the expression lnðN C =N D ÞkT 0 =q can be neglected. Equation (15) can well explain the MR plot according to equation (5), where the value extracted should be close to F BF . Therefore, by replacing F B0 by F BF =n in equation (9), the relationship between the ideality factor and and the parameters of the Gaussian distribution can be expressed Table 1.…”
Section: Dlts Measurementsmentioning
confidence: 91%