2002
DOI: 10.1103/physrevb.66.235205
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Electrical activity of carbon-hydrogen centers in Si

Abstract: The electrical activity of Cs-H defects in Si has been investigated in a combined modeling and experimental study. High-resolution Laplace capacitance spectroscopy with the uniaxial stress technique has been used to measure the stress-energy tensor and the results are compared with theoretical modeling. At low temperatures, implanted H is trapped as a negative-U center with a donor level in the upper half of the gap. However, at higher temperatures, H migrates closer to the carbon impurity and the donor level … Show more

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Cited by 38 publications
(46 citation statements)
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“…Furthermore, the defect does not show the Poole–Frenkel effect for electric fields up to 1.5 × 10 4 V cm −1 . This is in good agreement with findings of Endrös et al 14 and Andersen et al 15 for the CH defect. Also the E90 peak anneals out at temperatures below 400 K. The annealing at this temperature confirms further our assignment of E90 to the CH complex 14, 15.…”
Section: Resultssupporting
confidence: 93%
“…Furthermore, the defect does not show the Poole–Frenkel effect for electric fields up to 1.5 × 10 4 V cm −1 . This is in good agreement with findings of Endrös et al 14 and Andersen et al 15 for the CH defect. Also the E90 peak anneals out at temperatures below 400 K. The annealing at this temperature confirms further our assignment of E90 to the CH complex 14, 15.…”
Section: Resultssupporting
confidence: 93%
“…This is in good agreement with findings of Endrös et al 14 and Andersen et al 15 for the CH defect. Also the E90 peak anneals out at temperatures below 400 K. The annealing at this temperature confirms further our assignment of E90 to the CH complex 14, 15.…”
Section: Resultsmentioning
confidence: 99%
“…Instead, three defects dominate at low temperatures: H 2 *(C), C 2 H 2 , and VH 3 HC. Other well‐studied C–H centers 62 are not sufficiently stable to be relevant to studies of samples quenched from high temperatures.…”
Section: H In C‐rich Simentioning
confidence: 99%