Electric Field Induced Liquified Mass Transport Phenomenon in Chromium Thin Films on Application of an Alternating Potential

Ghosh, Swapnendu Narayan; Sarkar, Debjit De; Sashtri, Vijeyendra; Abraham, Ebinesh; Talukder, Santanu

doi:10.1109/nano47656.2020.9183698

Cited by 4 publications

(3 citation statements)

References 12 publications

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“…The reduction in electric field and the formation of a space charge reduces the concentration of oxyanions at the reaction site, and thus the amount or the rate of material formation reduces over time. Hence, the rate of reaction or the rate of increase of radius of the liquid region is maximum at the initial stages and falls off rapidly as time increases as is discussed and reported earlier [28].…”

Section: Resultssupporting

confidence: 57%

Humidity- tunable liquefaction of Cr thin-film and its application to patterning

Ghosh¹,

Talukder²

2022

Nanotechnology

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Electric field induced liquefaction of chromium (Cr) thin-films, being a surface-based process, is affected by the moisture content in the surroundings. The said process is an electrochemical reaction, which takes place on an electrically stressed Cr thin-film. The reaction results in a liquid region, which flows out radially from the tip of the cathode. A proper understanding of the phenomenon is warranted as it is applied for performing a nanolithography process, electrolithography (ELG). In this study we have focused on the effect of relative humidity (RH) on the material formation and transport on electrically stressed Cr thin-film. Varying the RH over a wide range, the phenomenon is studied using different levels of DC stress. The effect of the applied DC stress coupled with varying levels of RH showed trends which are explained qualitatively and quantitatively. The results indicate that RH could be a pivotal parameter affecting the above-mentioned phenomenon on electrically stressed Cr thin-films and could significantly alter the minimum feature size attainable by ELG. To demonstrate the effect of RH on ELG, lines were drawn at various humidity levels resulting in greater than 100% increase in the attainable line width when RH was increased by about 40%.

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Section: Resultssupporting

confidence: 57%

Humidity- tunable liquefaction of Cr thin-film and its application to patterning

Ghosh¹,

Talukder²

2022

Nanotechnology

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“…The formation of bubbles indicates that there may be a release of some gas due to the electric field induced chemical reaction. As has been discussed in the literature [15,16], at the beginning of the experiment, the current is quite high. This might lead to a rise in the temperature of the region near the cathode, and can thereby lead to the release of some of the dissolved gases in the liquid region.…”

Section: Results and Observationsmentioning

confidence: 59%

“…where Z wd is the charge number due to the electron wind and Z , el in this case, should be considered as the charge carried by each individual ion in the solution [16].…”

Section: Driving Force For Materials Transportmentioning

confidence: 99%

Kinematics and kinetics of alternating electric field induced liquid mass transport on chromium thin films

et al. 2021

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Long range mass transport driven by an electric field has many applications in the fields of nanoscience and technology. Liquid-phase mass transport ranging from the micrometer to the millimeter scale and its application to nanopatterning have been demonstrated on chromium (Cr) thin films using a DC electric field. Under the influence of an electric field, the metal seems to undergo a chemical reaction, and the resulting liquid material flows out radially in all directions. In this study, we have explored the effect of an alternating (AC) electric field on this kind of liquid-phase material transport. Within the scope of this work, mass transport has been studied on Cr films 30 nm thick using an alternating square waveform with frequencies ranging from 100 Hz to 1000 Hz in steps of 50 Hz. The dependence of the material’s formation, flow distance, and flow velocity on frequency, for a constant applied root mean square (RMS) voltage, was studied in detail. An analytical model is presented to explain the experimental results. This study, in particular the frequency parameter and the intermittent nature of the applied bias, will help us get a better control over the mass flow process, will lead to better resolutions for the electrolithography process.

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An Improved Electro-Kinetic Model for Material Transport on Cr Thin Films

Ghosh

Talukder

2022

2022 IEEE 22nd International Conference on Nanotechnology (NANO)

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Electric Field Induced Liquified Mass Transport Phenomenon in Chromium Thin Films on Application of an Alternating Potential

Cited by 4 publications

References 12 publications

Humidity- tunable liquefaction of Cr thin-film and its application to patterning

Humidity- tunable liquefaction of Cr thin-film and its application to patterning

Kinematics and kinetics of alternating electric field induced liquid mass transport on chromium thin films

An Improved Electro-Kinetic Model for Material Transport on Cr Thin Films

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