Abstract:The elastic properties of the cubic (c-) phase GaN confined in a nanoscale one-dimensional (1D) v-grooved Si(001) substrate are investigated. Along a ∼900 nm-wide v-groove formed with two facing Si(111)-type facets, submicrometer-wide c-GaN is achieved by the hexagonal-to c-phase (h−c) transition from the h-GaN which plays the role of an interlayer in its epitaxy on Si. The resulting nonplanar stack of c-GaN/h-GaN on Si has complicated stress distribution. This work focuses on the elastic properties the c-GaN,… Show more
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