Elastic and inelastic e-C2F6and e-C3F8cross sections from swarm data

Pirgov, P; Stefanov, B.

doi:10.1088/0953-4075/23/16/026

Cited by 19 publications

(11 citation statements)

References 12 publications

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“…It would seem that since no other technique showed a resonance at 1.4 eV, the observation of Lifshitz and Grajower may reflect the fact that some of the scattered electrons which were picked up by SF 6 might have been due to direct electron scattering due to vibrational excitation rather than indirect scattering from resonances. This would be consistent with the results of Sanabia et al 36 which indicate direct vibrational excitation below 2 eV, and with the low-lying maximum in the calculated 40 vib,inel () ͑Sec. 3.6.͒.…”

Section: Total Electron Scattering Cross Section Sct "…supporting

confidence: 92%

Electron Interactions With C3F8

Christophorou¹,

Olthoff²

1998

Journal of Physical and Chemical Reference Data

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To aid the many and diverse applications for which perfluoropropane (C 3 F 8 ) is suited, we critically evaluate and synthesize existing knowledge on electron scattering and electron energy-loss processes for the C 3 F 8 molecule, and provide recommendations for the most reliable data. We also draw attention to electron-interaction data that are not presently available, but are needed for modeling the behavior of C 3 F 8 in practical uses, especially plasma processing.

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Section: Total Electron Scattering Cross Section Sct "…supporting

confidence: 92%

Electron Interactions With C3F8

Christophorou¹,

Olthoff²

1998

Journal of Physical and Chemical Reference Data

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“…They show a pronounced Ramsauer-Townsend minimum at ϳ0.15 eV. The unpublished measurements of Merz and Linder 50 on the differential elastic scattering cross sections are in general agreement with those of Takagi et al 38 Compared to the two sets of experimental determinations 38,50 of m ͑͒, the results of the two Boltzmann-based computations 42,46 are in agreement with the measurements only near 3 eV.…”

Section: Momentum Transfer Cross Section "Elastic… M "…supporting

confidence: 72%

“…10. Hayashi and Niwa 42 reported three such cross sections, vib5 , vib6 , and vib7 , while Pirgov and Stefanov 46 reported an overall inelastic vibrational cross section. We determined the sum of the three inelastic vibrational excitation cross sections of Hayashi and Niwa, which is shown in Fig.…”

Section: Inelastic Electron Scattering Cross Section Inel "…mentioning

confidence: 99%

“…46 These were both Boltzmann-type calculations based on measured values of the electron drift velocity, w, and transverse electron diffusion coefficient to mobility ratio, D T /, as a function of E/N in the pure gas and in its mixtures with Ar. Pirgov and Stefanov used the w and D T / data of Naidu and Prasad 47 and Hunter et al 14 for pure C 2 F 6 , and the data of Hunter et al 14 on w and D T / for mixtures of C 2 F 6 with Ar.…”

Section: Momentum Transfer Cross Section "Elastic… M "…mentioning

confidence: 99%

“…transfer cross section of argon. Hayashi and Niwa 42 used the same experimental data on w, D T /, and electron attachment as Pirgov and Stefanov, 46 but in addition they employed input data for vibrational excitation, dissociation, and ionization ͑see Ref. 42͒.…”

Section: Momentum Transfer Cross Section "Elastic… M "…mentioning

confidence: 99%

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Electron Interactions with C2F6

Christophorou¹,

Olthoff²

1998

Journal of Physical and Chemical Reference Data

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Perfluoroethane ͑C 2 F 6 , hexafluoroethane͒ is a man-made gas with many important applications ͑e.g., in the aluminum industry, the semiconductor industry, plasma chemistry and etching technologies, and pulsed power switching͒. In these and other uses, knowledge of the interactions of slow electrons ͑kinetic energies less than about 100 eV͒ is fundamental in optimizing performance parameters involved in the particular application. We, therefore, have critically evaluated and synthesized existing knowledge on electron interactions with C 2 F 6 . The following cross sections and their intercomparison are presented and discussed: total electron scattering, momentum transfer, integral elastic, differential elastic, differential vibrational, vibrational inelastic, total ionization, partial ionization, total dissociation, and electron attachment. Information is presented also on the coefficients for electron impact ionization, effective ionization, electron attachment, and electron transport ͑lateral diffusion coefficient and drift velocity͒, as well as on the rate constant for electron attachment as a function of the mean electron energy and gas temperature. While some information is available for these cross sections, additional measurements are needed for each of them, especially for inelastic electron scattering and momentum transfer. No published data are available for dissociation of C 2 F 6 into neutral fragments. The coefficients are generally better known than the cross sections although further measurements on electron diffusion coefficients and electron attachment at high E/N values are indicated.

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