Electron Interactions with CF4, C2F6, and C3F8

Christophorou, Loucas G.; Olthoff, James K.

doi:10.1007/978-1-4419-8971-0_4

Fundamental Electron Interactions With Plasma Processing Gases 2004

DOI: 10.1007/978-1-4419-8971-0_4

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Electron Interactions with CF4, C2F6, and C3F8

Loucas G. Christophorou

James K. Olthoff

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Electron Interactions with CF4, C2F6, and C3F8

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References 233 publications

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